Abstract
This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 |
| Pages | 457-462 |
| Number of pages | 6 |
| Volume | 2 |
| DOIs | |
| Publication status | Published - 2010 |
| Event | ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 - Shanghai, China Duration: Dec 18 2009 → Dec 21 2009 |
Other
| Other | ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009 |
|---|---|
| Country | China |
| City | Shanghai |
| Period | 12/18/09 → 12/21/09 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Fluid Flow and Transfer Processes
Cite this
Carbon nanotube thermal probe using platinum nano hot-film. / Takahashi, Koji; Hirotani, Jun; Kai, Satoshi; Ikuta, Tatsuya.
Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009. Vol. 2 2010. p. 457-462.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Carbon nanotube thermal probe using platinum nano hot-film
AU - Takahashi, Koji
AU - Hirotani, Jun
AU - Kai, Satoshi
AU - Ikuta, Tatsuya
PY - 2010
Y1 - 2010
N2 - This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.
AB - This paper reports on a thermal probe using a carbon nanotube (CNT) on a platinum hot-film. CNT probe is expected to breakthrough the limitations of the existing ones owing to its unique characteristics but no practical thermal device has been fabricated yet. In order to explore the mechanisms of heating and measuring the smaller region than 10nm, we applied our recently developed sensor coupled with CNT, which consists of a suspended platinum film of 40nm × 500nm × 10micrometer. The principle of this probe as heater and sensor is explained, based on one dimensional heat conduction. Fabrication process using MEMS technique is also introduced, especially for a couple of critical techniques. One is to fabricate the nano sensor on an edge of the sensor substrate. The other is to bond a CNT on the suspended hot-film sensor. A CNT thermal probe using a multi-walled CNT of 70nm diameter and ca. 10 micrometers length is successfully fabricated. Its performances are tested in vacuum environment as to eliminate the presence of in-air conduction effect and water absorption effect around the contact point, which work for heat transport dominantly in atmospheric condition and degrade the spatial resolution. Our CNT probe showed a clear and reliable signal in vacuum and its sensitivity available for nanoscale thermal sensing and heating is confirmed.
UR - http://www.scopus.com/inward/record.url?scp=77954337669&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77954337669&partnerID=8YFLogxK
U2 - 10.1115/MNHMT2009-18356
DO - 10.1115/MNHMT2009-18356
M3 - Conference contribution
AN - SCOPUS:77954337669
SN - 9780791843895
VL - 2
SP - 457
EP - 462
BT - Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
ER -