Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall

Kazunori Koga, Ryuji Uehara, Yasuhiro Kitaura, Masaharu Shiratani, Yukio Watanabe, Akio Komori

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

Original languageEnglish
Pages (from-to)405-409
Number of pages5
JournalIEEE Transactions on Plasma Science
Volume32
Issue number2 I
DOIs
Publication statusPublished - Apr 1 2004

Fingerprint

fiber composites
carbon fibers
fibers
carbon
interactions
flakes
electron cyclotron resonance
sheaths
surface reactions
light emission
reactors
methylidyne
electric potential
gases

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Condensed Matter Physics

Cite this

Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall. / Koga, Kazunori; Uehara, Ryuji; Kitaura, Yasuhiro; Shiratani, Masaharu; Watanabe, Yukio; Komori, Akio.

In: IEEE Transactions on Plasma Science, Vol. 32, No. 2 I, 01.04.2004, p. 405-409.

Research output: Contribution to journalArticle

@article{64466af2996d4e4ba57ceb07775b8bb1,
title = "Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall",
abstract = "Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.",
author = "Kazunori Koga and Ryuji Uehara and Yasuhiro Kitaura and Masaharu Shiratani and Yukio Watanabe and Akio Komori",
year = "2004",
month = "4",
day = "1",
doi = "10.1109/TPS.2004.828129",
language = "English",
volume = "32",
pages = "405--409",
journal = "IEEE Transactions on Plasma Science",
issn = "0093-3813",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2 I",

}

TY - JOUR

T1 - Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall

AU - Koga, Kazunori

AU - Uehara, Ryuji

AU - Kitaura, Yasuhiro

AU - Shiratani, Masaharu

AU - Watanabe, Yukio

AU - Komori, Akio

PY - 2004/4/1

Y1 - 2004/4/1

N2 - Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

AB - Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

UR - http://www.scopus.com/inward/record.url?scp=4344707692&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=4344707692&partnerID=8YFLogxK

U2 - 10.1109/TPS.2004.828129

DO - 10.1109/TPS.2004.828129

M3 - Article

AN - SCOPUS:4344707692

VL - 32

SP - 405

EP - 409

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 2 I

ER -