Carbon particle formation due to interaction between H2 plasma and carbon fiber composite wall

Kazunori Koga, Ryuji Uehara, Yasuhiro Kitaura, Masaharu Shiratani, Yukio Watanabe, Akio Komori

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Formation of carbon particles due to plasma surface interaction has been studied using an electron cyclotron resonance (ECR) plasma device. The interaction produces two sizes of groups: small spherical ones of 2-25 nm in size and large particles of irregular shape and above 100 nm in size. The latter are considered to be flakes peeled from carbon films deposited on the reactor wall. The total amount and average size of small particles tends to decrease with increasing the sheath voltage Vs between plasma and the carbon fiber composite (CFC) wall from 14 to 214 V. Optical emission intensities of CH and C as well as gas absorption rate to the CFC wall also decrease with increasing Vs. These results suggest that the carbon-containing species emitted from the CFC wall contribute to formation of small particles.

Original languageEnglish
Pages (from-to)405-409
Number of pages5
JournalIEEE Transactions on Plasma Science
Volume32
Issue number2 I
DOIs
Publication statusPublished - Apr 2004

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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