Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation

Maiko Nishibori, Woosuck Shin, Kazuki Tajima, Lionel F. Houlet, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume45
Issue number42-45
DOIs
Publication statusPublished - Nov 10 2006
Externally publishedYes

Fingerprint

Thermopiles
thermopiles
combustion chambers
Combustors
Power generation
ceramics
thermoelectric generators
catalysts
electric generators
Catalysts
Wet etching
Gas fuels
Thermoelectric power
room temperature
gas flow
Flow of gases
Alumina
aluminum oxides
etching
membranes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation. / Nishibori, Maiko; Shin, Woosuck; Tajima, Kazuki; Houlet, Lionel F.; Izu, Noriya; Matsubara, Ichiro; Murayama, Norimitsu.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 45, No. 42-45, 10.11.2006.

Research output: Contribution to journalArticle

Nishibori, Maiko ; Shin, Woosuck ; Tajima, Kazuki ; Houlet, Lionel F. ; Izu, Noriya ; Matsubara, Ichiro ; Murayama, Norimitsu. / Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation. In: Japanese Journal of Applied Physics, Part 2: Letters. 2006 ; Vol. 45, No. 42-45.
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