Cavity ring-down spectroscopy sensor for ion beam etch monitoring and end-point detection of multilayer structures

L. Tao, A. P. Yalin, N. Yamamoto

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This contribution reports on the development of in situ sputter monitoring and end-point detection for ion beam etch systems using continuous-wave cavity ring-down spectroscopy (cw-CRDS). The demonstrated system is based on the detection of sputtered manganese atoms using a tunable external cavity diode laser in the vicinity of 403.07 nm. The cw-CRDS system is described and measurements from a manganese-iron target are presented. End-point detection is demonstrated by monitoring the time dependence of manganese concentration for a multilayer target comprised of alternating layers of manganese/iron and titanium. Detection limits are shown to be adequate for today's commercial ion beam sputter systems.

Original languageEnglish
Article number115107
JournalReview of Scientific Instruments
Volume79
Issue number11
DOIs
Publication statusPublished - 2008

All Science Journal Classification (ASJC) codes

  • Instrumentation

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