Characteristic of VHF plasma produced by balanced power feeding

K. Ogiwara, W. Chen, K. Uchino, Y. Kawai

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined using a two-dimensional hybrid model. The simulation results showed that the electron density peaks at a certain pressure inside the discharge electrodes and significantly decreases outside the electrodes for high gas pressure. In addition, the power absorption efficiency inside the electrodes was improved by increasing the gas pressure. On the other hand, the plasma was produced within the electrodes for low applied voltages.

Original languageEnglish
Article number012022
JournalJournal of Physics: Conference Series
Volume441
Issue number1
DOIs
Publication statusPublished - 2013
Event11th Asia Pacific Conference on Plasma Science and Technology, APCPST 2012 and 25th Symposium on Plasma Science for Materials, SPSM 2012 - Kyoto, Japan
Duration: Oct 2 2012Oct 5 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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