TY - GEN
T1 - Characteristics of a monolithically integrated micro-displacement sensor
AU - Takeshita, Toshihiro
AU - Peng, Yao
AU - Morita, Nobutomo
AU - Ando, Hideyuki
AU - Higurashi, Eiji
AU - Sawada, Renshi
PY - 2011
Y1 - 2011
N2 - The authors report on the development of an optical ultra-micro- displacement sensor with a simple structure that is 3.0 x 3.0 mm square and 1.3 mm thick, and fabricated using MEMS technology. The displacement sensor only consists of a vertical cavity surface emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame and a cover glass. The sensor principle is laser triangulation. With the eight PDs arranged in concentric circles around the VCSEL, the influences of mirror tilt and changes in mirror reflectivity are expected to be eliminated. This sensor can measure linear displacement within an accuracy of 0.856 % F.S. at 200 μm, and 1.11 % F.S. at 500 μm. Moreover, when the tilt of the object being measured is less than 0.6°, the influence of the tilt can be ignored to some extent. In this paper, we present our method for measuring the mirror displacement and removing any influences of mirror tilt and change in mirror reflectivity.
AB - The authors report on the development of an optical ultra-micro- displacement sensor with a simple structure that is 3.0 x 3.0 mm square and 1.3 mm thick, and fabricated using MEMS technology. The displacement sensor only consists of a vertical cavity surface emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame and a cover glass. The sensor principle is laser triangulation. With the eight PDs arranged in concentric circles around the VCSEL, the influences of mirror tilt and changes in mirror reflectivity are expected to be eliminated. This sensor can measure linear displacement within an accuracy of 0.856 % F.S. at 200 μm, and 1.11 % F.S. at 500 μm. Moreover, when the tilt of the object being measured is less than 0.6°, the influence of the tilt can be ignored to some extent. In this paper, we present our method for measuring the mirror displacement and removing any influences of mirror tilt and change in mirror reflectivity.
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M3 - Conference contribution
AN - SCOPUS:84872503568
SN - 9781618393067
T3 - 14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology
SP - 133
EP - 138
BT - 14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
T2 - 14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
Y2 - 31 August 2011 through 2 September 2011
ER -