Characteristics of a monolithically integrated micro-displacement sensor

Toshihiro Takeshita, Yao Peng, Nobutomo Morita, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The authors report on the development of an optical ultra-micro- displacement sensor with a simple structure that is 3.0 x 3.0 mm square and 1.3 mm thick, and fabricated using MEMS technology. The displacement sensor only consists of a vertical cavity surface emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame and a cover glass. The sensor principle is laser triangulation. With the eight PDs arranged in concentric circles around the VCSEL, the influences of mirror tilt and changes in mirror reflectivity are expected to be eliminated. This sensor can measure linear displacement within an accuracy of 0.856 % F.S. at 200 μm, and 1.11 % F.S. at 500 μm. Moreover, when the tilt of the object being measured is less than 0.6°, the influence of the tilt can be ignored to some extent. In this paper, we present our method for measuring the mirror displacement and removing any influences of mirror tilt and change in mirror reflectivity.

Original languageEnglish
Title of host publication14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
Pages133-138
Number of pages6
Publication statusPublished - Dec 1 2011
Event14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology - Jena, Germany
Duration: Aug 31 2011Sep 2 2011

Publication series

Name14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology

Other

Other14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
CountryGermany
CityJena
Period8/31/119/2/11

Fingerprint

Mirrors
Sensors
Surface emitting lasers
Photodiodes
Triangulation
MEMS
Glass
Lasers

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Safety, Risk, Reliability and Quality

Cite this

Takeshita, T., Peng, Y., Morita, N., Ando, H., Higurashi, E., & Sawada, R. (2011). Characteristics of a monolithically integrated micro-displacement sensor. In 14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology (pp. 133-138). (14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology).

Characteristics of a monolithically integrated micro-displacement sensor. / Takeshita, Toshihiro; Peng, Yao; Morita, Nobutomo; Ando, Hideyuki; Higurashi, Eiji; Sawada, Renshi.

14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology. 2011. p. 133-138 (14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takeshita, T, Peng, Y, Morita, N, Ando, H, Higurashi, E & Sawada, R 2011, Characteristics of a monolithically integrated micro-displacement sensor. in 14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology. 14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology, pp. 133-138, 14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology, Jena, Germany, 8/31/11.
Takeshita T, Peng Y, Morita N, Ando H, Higurashi E, Sawada R. Characteristics of a monolithically integrated micro-displacement sensor. In 14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology. 2011. p. 133-138. (14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology).
Takeshita, Toshihiro ; Peng, Yao ; Morita, Nobutomo ; Ando, Hideyuki ; Higurashi, Eiji ; Sawada, Renshi. / Characteristics of a monolithically integrated micro-displacement sensor. 14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology. 2011. pp. 133-138 (14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology).
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