Characteristics of a monolithically integrated micro-displacement sensor

Toshihiro Takeshita, Yao Peng, Nobutomo Morita, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    7 Citations (Scopus)

    Abstract

    The authors report on the development of an optical ultra-micro- displacement sensor with a simple structure that is 3.0 x 3.0 mm square and 1.3 mm thick, and fabricated using MEMS technology. The displacement sensor only consists of a vertical cavity surface emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame and a cover glass. The sensor principle is laser triangulation. With the eight PDs arranged in concentric circles around the VCSEL, the influences of mirror tilt and changes in mirror reflectivity are expected to be eliminated. This sensor can measure linear displacement within an accuracy of 0.856 % F.S. at 200 μm, and 1.11 % F.S. at 500 μm. Moreover, when the tilt of the object being measured is less than 0.6°, the influence of the tilt can be ignored to some extent. In this paper, we present our method for measuring the mirror displacement and removing any influences of mirror tilt and change in mirror reflectivity.

    Original languageEnglish
    Title of host publication14th Joint Int. IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
    Pages133-138
    Number of pages6
    Publication statusPublished - 2011
    Event14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology - Jena, Germany
    Duration: Aug 31 2011Sep 2 2011

    Publication series

    Name14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conj. with the 56th IWK Ilmenau University of Technology

    Other

    Other14th Joint International IMEKO TC1, TC7, TC13 Symposium on Intelligent Quality Measurements - Theory, Education and Training 2011, Held in Conjunction with the 56th IWK Ilmenau University of Technology
    CountryGermany
    CityJena
    Period8/31/119/2/11

    All Science Journal Classification (ASJC) codes

    • Artificial Intelligence
    • Safety, Risk, Reliability and Quality

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