Characteristics of all-Nb thin film microbridges by nanometer fabrication

Yuichi Harada, N. Hirose, Y. Uzawa, M. Sekine

Research output: Contribution to conferencePaper

Abstract

We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.

Original languageEnglish
Pages520-522
Number of pages3
Publication statusPublished - Jan 1 1991
Externally publishedYes
Event23rd International Conference on Solid State Devices and Materials - SSDM '91 - Yokohama, Jpn
Duration: Aug 27 1991Aug 29 1991

Other

Other23rd International Conference on Solid State Devices and Materials - SSDM '91
CityYokohama, Jpn
Period8/27/918/29/91

Fingerprint

Radiation
Fabrication
Thin films

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Harada, Y., Hirose, N., Uzawa, Y., & Sekine, M. (1991). Characteristics of all-Nb thin film microbridges by nanometer fabrication. 520-522. Paper presented at 23rd International Conference on Solid State Devices and Materials - SSDM '91, Yokohama, Jpn, .

Characteristics of all-Nb thin film microbridges by nanometer fabrication. / Harada, Yuichi; Hirose, N.; Uzawa, Y.; Sekine, M.

1991. 520-522 Paper presented at 23rd International Conference on Solid State Devices and Materials - SSDM '91, Yokohama, Jpn, .

Research output: Contribution to conferencePaper

Harada, Y, Hirose, N, Uzawa, Y & Sekine, M 1991, 'Characteristics of all-Nb thin film microbridges by nanometer fabrication' Paper presented at 23rd International Conference on Solid State Devices and Materials - SSDM '91, Yokohama, Jpn, 8/27/91 - 8/29/91, pp. 520-522.
Harada Y, Hirose N, Uzawa Y, Sekine M. Characteristics of all-Nb thin film microbridges by nanometer fabrication. 1991. Paper presented at 23rd International Conference on Solid State Devices and Materials - SSDM '91, Yokohama, Jpn, .
Harada, Yuichi ; Hirose, N. ; Uzawa, Y. ; Sekine, M. / Characteristics of all-Nb thin film microbridges by nanometer fabrication. Paper presented at 23rd International Conference on Solid State Devices and Materials - SSDM '91, Yokohama, Jpn, .3 p.
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