Characteristics of all-Nb thin film microbridges by nanometer fabrication

Y. Harada; N. Hirose; Y. Uzawa; M. Sekine

doi:10.7567/ssdm.1991.pb5-6

Characteristics of all-Nb thin film microbridges by nanometer fabrication

Y. Harada, N. Hirose, Y. Uzawa, M. Sekine

Research output: Contribution to conference › Paper › peer-review

Abstract

We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.

Original language	English
Pages	520-522
Number of pages	3
DOIs	https://doi.org/10.7567/ssdm.1991.pb5-6
Publication status	Published - 1991
Externally published	Yes
Event	23rd International Conference on Solid State Devices and Materials - SSDM '91 - Yokohama, Jpn Duration: Aug 27 1991 → Aug 29 1991

Other

Other	23rd International Conference on Solid State Devices and Materials - SSDM '91
City	Yokohama, Jpn
Period	8/27/91 → 8/29/91

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.7567/ssdm.1991.pb5-6

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title = "Characteristics of all-Nb thin film microbridges by nanometer fabrication",

abstract = "We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.",

author = "Y. Harada and N. Hirose and Y. Uzawa and M. Sekine",

year = "1991",

doi = "10.7567/ssdm.1991.pb5-6",

language = "English",

pages = "520--522",

note = "23rd International Conference on Solid State Devices and Materials - SSDM '91 ; Conference date: 27-08-1991 Through 29-08-1991",

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TY - CONF

T1 - Characteristics of all-Nb thin film microbridges by nanometer fabrication

AU - Harada, Y.

AU - Hirose, N.

AU - Uzawa, Y.

AU - Sekine, M.

PY - 1991

Y1 - 1991

N2 - We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.

AB - We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.

UR - http://www.scopus.com/inward/record.url?scp=0025867881&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0025867881&partnerID=8YFLogxK

U2 - 10.7567/ssdm.1991.pb5-6

DO - 10.7567/ssdm.1991.pb5-6

M3 - Paper

AN - SCOPUS:0025867881

SP - 520

EP - 522

T2 - 23rd International Conference on Solid State Devices and Materials - SSDM '91

Y2 - 27 August 1991 through 29 August 1991

ER -

Characteristics of all-Nb thin film microbridges by nanometer fabrication

Abstract

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All Science Journal Classification (ASJC) codes

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