Abstract
We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.
| Original language | English |
|---|---|
| Pages | 520-522 |
| Number of pages | 3 |
| Publication status | Published - Jan 1 1991 |
| Externally published | Yes |
| Event | 23rd International Conference on Solid State Devices and Materials - SSDM '91 - Yokohama, Jpn Duration: Aug 27 1991 → Aug 29 1991 |
Other
| Other | 23rd International Conference on Solid State Devices and Materials - SSDM '91 |
|---|---|
| City | Yokohama, Jpn |
| Period | 8/27/91 → 8/29/91 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
Characteristics of all-Nb thin film microbridges by nanometer fabrication. / Harada, Y.; Hirose, N.; Uzawa, Y.; Sekine, M.
1991. 520-522 Paper presented at 23rd International Conference on Solid State Devices and Materials - SSDM '91, Yokohama, Jpn, .Research output: Contribution to conference › Paper
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TY - CONF
T1 - Characteristics of all-Nb thin film microbridges by nanometer fabrication
AU - Harada, Y.
AU - Hirose, N.
AU - Uzawa, Y.
AU - Sekine, M.
PY - 1991/1/1
Y1 - 1991/1/1
N2 - We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.
AB - We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.
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M3 - Paper
AN - SCOPUS:0025867881
SP - 520
EP - 522
ER -