Abstract
We have fabricated the all-Nb thin film microbridges by our developed nanometer process. These microbridges have high sensitivity of radiation and reliability. It is observed that the properties of devices change by varying the sizes of bridge-region. We have also fabricated the series arrays and observed that they operate coherently.
Original language | English |
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Pages | 520-522 |
Number of pages | 3 |
DOIs | |
Publication status | Published - 1991 |
Event | 23rd International Conference on Solid State Devices and Materials - SSDM '91 - Yokohama, Jpn Duration: Aug 27 1991 → Aug 29 1991 |
Other
Other | 23rd International Conference on Solid State Devices and Materials - SSDM '91 |
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City | Yokohama, Jpn |
Period | 8/27/91 → 8/29/91 |
All Science Journal Classification (ASJC) codes
- Engineering(all)