Characteristics of extreme ultraviolet emission from CO2 laser-produced plasma

Akihiko Takahashi, Hiroki Tanaka, Yuuki Hashimoto, Tatsuo Okada

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO2 laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO2 laser. The conversion efficiency to 13.5 nm was ∼0.2%. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO2 LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO2 LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO2 LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2% in maximum.

Original languageEnglish
Pages (from-to)155-159
Number of pages5
JournalIEEJ Transactions on Electronics, Information and Systems
Volume127
Issue number2
DOIs
Publication statusPublished - Jan 1 2007

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Laser produced plasmas
Conversion efficiency
Extreme ultraviolet lithography
Lasers
Tin
Wavelength

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Characteristics of extreme ultraviolet emission from CO2 laser-produced plasma. / Takahashi, Akihiko; Tanaka, Hiroki; Hashimoto, Yuuki; Okada, Tatsuo.

In: IEEJ Transactions on Electronics, Information and Systems, Vol. 127, No. 2, 01.01.2007, p. 155-159.

Research output: Contribution to journalArticle

@article{6b05a1f65ae54c64a28590996eee6149,
title = "Characteristics of extreme ultraviolet emission from CO2 laser-produced plasma",
abstract = "In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO2 laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO2 laser. The conversion efficiency to 13.5 nm was ∼0.2{\%}. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO2 LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO2 LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO2 LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2{\%} in maximum.",
author = "Akihiko Takahashi and Hiroki Tanaka and Yuuki Hashimoto and Tatsuo Okada",
year = "2007",
month = "1",
day = "1",
doi = "10.1541/ieejeiss.127.155",
language = "English",
volume = "127",
pages = "155--159",
journal = "IEEJ Transactions on Electronics, Information and Systems",
issn = "0385-4221",
publisher = "The Institute of Electrical Engineers of Japan",
number = "2",

}

TY - JOUR

T1 - Characteristics of extreme ultraviolet emission from CO2 laser-produced plasma

AU - Takahashi, Akihiko

AU - Tanaka, Hiroki

AU - Hashimoto, Yuuki

AU - Okada, Tatsuo

PY - 2007/1/1

Y1 - 2007/1/1

N2 - In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO2 laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO2 laser. The conversion efficiency to 13.5 nm was ∼0.2%. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO2 LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO2 LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO2 LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2% in maximum.

AB - In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO2 laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO2 laser. The conversion efficiency to 13.5 nm was ∼0.2%. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO2 LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO2 LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO2 LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2% in maximum.

UR - http://www.scopus.com/inward/record.url?scp=33847727813&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847727813&partnerID=8YFLogxK

U2 - 10.1541/ieejeiss.127.155

DO - 10.1541/ieejeiss.127.155

M3 - Article

AN - SCOPUS:33847727813

VL - 127

SP - 155

EP - 159

JO - IEEJ Transactions on Electronics, Information and Systems

JF - IEEJ Transactions on Electronics, Information and Systems

SN - 0385-4221

IS - 2

ER -