We proposed the floating potential method to estimate the negative ion density in a negative ion plasma. The floating potential in a negative ion double plasma was examined as a function of negative ion concentration and compared with the theoretical value calculated from the sheath equation including negative ions. Here, the negative ion plasma was produced by introducing SF6 gas into a Xe (Ar) double plasma. The negative ion density mormalized to the ion density was estimated from the reduction of the electron saturation current. It was found that the observed floating potential agree with the theoretical values qualitatively. In this paper, we propose the floating potential method to estimate the negative ion density in a negative ion plasma. The characteristics of the floating potential in a SF6/Xe double plasma are examined with the Langmuir probe, where the negative ion concentration is estimated from the reduction of the electron saturation current. It is found that the observed floating potential agrees with the theoretical values calculated using the sheath equation including negative ions.
|Number of pages||6|
|Journal||Plasma Processes and Polymers|
|Publication status||Published - Jun 2014|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Polymers and Plastics