Characteristics of laser-ablated plasma and properties of diamond-like carbon film in pulsed laser deposition

Yukihiko Yamagata, Tamiko Ohshima, Tomoaki Ikegami, Raj K. Thareja, Kenji Ebihara, Ajay Sharma, Robert M. Mayo, Jagdish Narayan

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1 Citation (Scopus)

Abstract

Characteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Πg - a 3Πu) and C3 (Comet Head System, A 1Πu-X 1 σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

Original languageEnglish
Pages (from-to)P6551-P6556
JournalMaterials Research Society Symposium - Proceedings
Volume648
Publication statusPublished - Jan 1 2001
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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