Characteristics of the post-ionization using femto-second laser (fs laser) combined with the secondary ion mass spectrometer were investigated. For many metals, ionization saturations were confirmed for the laser power density of >2 × 10 13 W/cm 2 . The characteristic curve of ionization of Ag against the laser power density suggests the occurrence of ionization through the multi-photon resonance excitation. Sensitivity increase after employing the fs laser post-ionization was manifested and a sputtered Cu signal from a minute circular area with a diameter of about 200 nm could be detected clearly.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films