TY - JOUR
T1 - Characteristics of surface sterilization using electron cyclotron resonance plasma
AU - Yonesu, Akira
AU - Hara, Kazufumi
AU - Nishikawa, Tatsuya
AU - Hayashi, Nobuya
N1 - Publisher Copyright:
© 2016 The Japan Society of Applied Physics.
PY - 2016
Y1 - 2016
N2 - The characteristics of surface sterilization using electron cyclotron resonance (ECR) plasma were investigated. High-energy electrons and oxygen radicals were observed in the ECR zone using electric probe and optical emission spectroscopic methods. A biological indicator (BI), Geobacillus stearothermophilus, containing 1 × 106 spores was sterilized in 120 s by exposure to oxygen discharges while maintaining a temperature of approximately 55 °C at the BI installation position. Oxygen radicals and high-energy electrons were found to be the sterilizing species in the ECR region. It was demonstrated that the ECR plasma could be produced in narrow tubes with an inner diameter of 5 mm. Moreover, sterilization tests confirmed that the spores present inside the narrow tube were successfully inactivated by ECR plasma irradiation.
AB - The characteristics of surface sterilization using electron cyclotron resonance (ECR) plasma were investigated. High-energy electrons and oxygen radicals were observed in the ECR zone using electric probe and optical emission spectroscopic methods. A biological indicator (BI), Geobacillus stearothermophilus, containing 1 × 106 spores was sterilized in 120 s by exposure to oxygen discharges while maintaining a temperature of approximately 55 °C at the BI installation position. Oxygen radicals and high-energy electrons were found to be the sterilizing species in the ECR region. It was demonstrated that the ECR plasma could be produced in narrow tubes with an inner diameter of 5 mm. Moreover, sterilization tests confirmed that the spores present inside the narrow tube were successfully inactivated by ECR plasma irradiation.
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U2 - 10.7567/JJAP.55.07LG08
DO - 10.7567/JJAP.55.07LG08
M3 - Article
AN - SCOPUS:85056278640
SN - 0021-4922
VL - 55
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7S2
M1 - 07LG08
ER -