Characterization of gated cold cathode fabrication using standing thin-film technique

Tomoya Yoshida, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have proposed a novel process of fabricating a high-aspect-ratio tip structure, which utilizes the bending of a cantilever made of a sputter deposited WSi2 film induced by ion irradiation. We demonstrated high-current field-electron emission from a gated field emitter array (FEA) fabricated by using the thin-film standing technique. In this paper, characterization of the FEA particularly in terms of emission stability and uniformity is reported. We find an ac-driving is more suitable than a dc-driving in order to decrease the required number of tips in a pixel and to meet the requirement of FED application.

Original languageEnglish
Title of host publication8th IEEE International Vacuum Electronics Conference, IVEC 2007
Pages201-202
Number of pages2
DOIs
Publication statusPublished - Dec 1 2007
Event8th IEEE International Vacuum Electronics Conference, IVEC 2007 - Kitakyushu, Japan
Duration: May 15 2007May 17 2007

Publication series

Name8th IEEE International Vacuum Electronics Conference, IVEC 2007

Other

Other8th IEEE International Vacuum Electronics Conference, IVEC 2007
CountryJapan
CityKitakyushu
Period5/15/075/17/07

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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