Characterization of Glow Discharge α-Si: H Films by Time-of-Flight Measurement—Comoarative Studv of Monosilane and Disilane Films

Junji Shirafuji, Reiji Hattori, Kazuhiro Shirakawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)110-116
Number of pages7
JournalIEEJ Transactions on Industry Applications
Volume108
Issue number2
DOIs
Publication statusPublished - Jan 1 1988
Externally publishedYes

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Glow discharges

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Characterization of Glow Discharge α-Si : H Films by Time-of-Flight Measurement—Comoarative Studv of Monosilane and Disilane Films. / Shirafuji, Junji; Hattori, Reiji; Shirakawa, Kazuhiro.

In: IEEJ Transactions on Industry Applications, Vol. 108, No. 2, 01.01.1988, p. 110-116.

Research output: Contribution to journalArticle

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