| Original language | English |
|---|---|
| Pages (from-to) | 110-116 |
| Number of pages | 7 |
| Journal | IEEJ Transactions on Industry Applications |
| Volume | 108 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Jan 1 1988 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering
Cite this
Characterization of Glow Discharge α-Si : H Films by Time-of-Flight Measurement—Comoarative Studv of Monosilane and Disilane Films. / Shirafuji, Junji; Hattori, Reiji; Shirakawa, Kazuhiro.
In: IEEJ Transactions on Industry Applications, Vol. 108, No. 2, 01.01.1988, p. 110-116.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Characterization of Glow Discharge α-Si
T2 - H Films by Time-of-Flight Measurement—Comoarative Studv of Monosilane and Disilane Films
AU - Shirafuji, Junji
AU - Hattori, Reiji
AU - Shirakawa, Kazuhiro
PY - 1988/1/1
Y1 - 1988/1/1
UR - http://www.scopus.com/inward/record.url?scp=85008730596&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85008730596&partnerID=8YFLogxK
U2 - 10.1541/ieejias.108.110
DO - 10.1541/ieejias.108.110
M3 - Article
AN - SCOPUS:85008730596
VL - 108
SP - 110
EP - 116
JO - IEEJ Transactions on Industry Applications
JF - IEEJ Transactions on Industry Applications
SN - 0913-6339
IS - 2
ER -