@article{1be8b5080382461cafa34bf8590448ff,
title = "Characterization of Glow Discharge α-Si: H Films by Time-of-Flight Measurement—Comoarative Studv of Monosilane and Disilane Films",
author = "Junji Shirafuji and Reiji Hattori and Kazuhiro Shirakawa",
year = "1988",
doi = "10.1541/ieejias.108.110",
language = "English",
volume = "108",
pages = "110--116",
journal = "IEEJ Transactions on Industry Applications",
issn = "0913-6339",
publisher = "The Institute of Electrical Engineers of Japan",
number = "2",
}