Characterization of Glow Discharge α-Si: H Films by Time-of-Flight Measurement—Comoarative Studv of Monosilane and Disilane Films

Junji Shirafuji, Reiji Hattori, Kazuhiro Shirakawa

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)110-116
Number of pages7
JournalIEEJ Transactions on Industry Applications
Volume108
Issue number2
DOIs
Publication statusPublished - 1988
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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