Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

A. Takano, K. Maehata, N. Iyomoto, K. Yasuda, H. Maeno, K. Shiiyama, K. Tanaka

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

Original languageEnglish
Pages (from-to)832-838
Number of pages7
JournalJournal of Low Temperature Physics
Volume184
Issue number3-4
DOIs
Publication statusPublished - Aug 1 2016

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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