Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

A. Takano; K. Maehata; N. Iyomoto; K. Yasuda; H. Maeno; K. Shiiyama; K. Tanaka

doi:10.1007/s10909-015-1350-6

Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

A. Takano, K. Maehata, N. Iyomoto, K. Yasuda, H. Maeno, K. Shiiyama, K. Tanaka

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

Original language	English
Pages (from-to)	832-838
Number of pages	7
Journal	Journal of Low Temperature Physics
Volume	184
Issue number	3-4
DOIs	https://doi.org/10.1007/s10909-015-1350-6
Publication status	Published - Aug 1 2016

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
Materials Science(all)
Condensed Matter Physics

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10.1007/s10909-015-1350-6

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title = "Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM",

abstract = "Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.",

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doi = "10.1007/s10909-015-1350-6",

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T1 - Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

AU - Takano, A.

AU - Maehata, K.

AU - Iyomoto, N.

AU - Yasuda, K.

AU - Maeno, H.

AU - Shiiyama, K.

AU - Tanaka, K.

PY - 2016/8/1

Y1 - 2016/8/1

N2 - Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

AB - Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

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Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

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