Abstract
Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about 0.02mm2, polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.
| Original language | English |
|---|---|
| Pages (from-to) | 832-838 |
| Number of pages | 7 |
| Journal | Journal of Low Temperature Physics |
| Volume | 184 |
| Issue number | 3-4 |
| DOIs | |
| Publication status | Published - Aug 1 2016 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
- Materials Science(all)
- Condensed Matter Physics
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Takano, A., Maehata, K., Iyomoto, N., Yasuda, K., Maeno, H., Shiiyama, K., & Tanaka, K. (2016). Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM. Journal of Low Temperature Physics, 184(3-4), 832-838. https://doi.org/10.1007/s10909-015-1350-6