TY - JOUR
T1 - Characterization of surface microstructures on Bio-based Polymer film fabricated with nano-imprint lithography by synchrotron radiation small angle X-ray scattering
AU - Shinohara, Takamichi
AU - Shirahase, Tomoko
AU - Murakami, Daiki
AU - Hoshino, Taiki
AU - Kikuchi, Moriya
AU - Koike, Jun Ichiro
AU - Horigome, Misao
AU - Masunaga, Hiroyasu
AU - Ogawa, Hiroki
AU - Takahara, Atsushi
N1 - Copyright:
Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - Nano-imprint lithography (NIL) is a simple, low cost and high-resolution patterning method. However the precise evaluation method of nano-imprinted structure has not been established. Synchrotron radiation small angle X-ray scattering (SR-SAXS) measurement is a nondestructive and high resolution characterization method. In this study, we attempt to fabricate nanostructures on the poly(lactic acid) (PLA) film by NIL and evaluated with microscopic and scattering techniques. The mold with line/space pattern was used for NIL. Scanning electron microscope observation confirmed the formation of surface nano-structure in large areas. Also, nano-imprinted PLA film was evaluated using SR-SAXS measurement. The scattering patterns obtained from nano-imprinted PLA films were clearly observed up to higher order scattering spots. These results suggested that highly regular structure was fabricated on the surface of PLA films.
AB - Nano-imprint lithography (NIL) is a simple, low cost and high-resolution patterning method. However the precise evaluation method of nano-imprinted structure has not been established. Synchrotron radiation small angle X-ray scattering (SR-SAXS) measurement is a nondestructive and high resolution characterization method. In this study, we attempt to fabricate nanostructures on the poly(lactic acid) (PLA) film by NIL and evaluated with microscopic and scattering techniques. The mold with line/space pattern was used for NIL. Scanning electron microscope observation confirmed the formation of surface nano-structure in large areas. Also, nano-imprinted PLA film was evaluated using SR-SAXS measurement. The scattering patterns obtained from nano-imprinted PLA films were clearly observed up to higher order scattering spots. These results suggested that highly regular structure was fabricated on the surface of PLA films.
UR - http://www.scopus.com/inward/record.url?scp=81355139753&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=81355139753&partnerID=8YFLogxK
U2 - 10.1088/1757-899X/24/1/012004
DO - 10.1088/1757-899X/24/1/012004
M3 - Conference article
AN - SCOPUS:81355139753
SN - 1757-8981
VL - 24
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
IS - 1
M1 - 012004
T2 - 2010 Summer Workshop on Buried Interface Science with X-Rays and Neutrons
Y2 - 25 July 2010 through 27 July 2010
ER -