Fingerprint
Dive into the research topics of 'Characterization of tantalum nitride thin films fabricated by pulsed Nd: YAG laser deposition method'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Characterization of tantalum nitride thin films fabricated by pulsed Nd: YAG laser deposition method
H. Kawasaki, K. Doi, J. Namba, Y. Suda, T. Ohshima, K. Ebihara
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)