Characterization of Z-pinch plasmas for EUV light sources

S. Katsuki, H. Imamura, S. Akiyoshi, T. Namihira, T. Sakugawa, H. Akiyama, K. Tomita, K. Uchino

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes the characterization of Z-pinch xenon plasmas for EUV sources. The plasmas were driven by a 15 J pulsed power generator, which delivers pulsed currents (35 kA, 120 ns) to the short circuit load. We have developed a time-resolved interferogram and a Thomson scattering system to characterize the Z-pinch plasmas. The interferogram using a pulsed Nd:YAG laser (532 nm, 7 ns) shows the temporal development of the radial profile of electron density. The electron density in the core plasma during pinch phase was 1.2 × 1019 cm-3. Preliminary result of the Thomson scattering measurement shows the electron temperature and density at the decay phase of the pinch process were 5.5 eV and 3 × 1017 cm -3, respectively.

Original languageEnglish
Title of host publication2005 IEEE Pulsed Power Conference, PPC
Pages864-867
Number of pages4
DOIs
Publication statusPublished - 2007
Event2005 IEEE Pulsed Power Conference, PPC - Monterey, CA, United States
Duration: Jun 13 2005Jun 17 2005

Publication series

NameDigest of Technical Papers-IEEE International Pulsed Power Conference

Other

Other2005 IEEE Pulsed Power Conference, PPC
CountryUnited States
CityMonterey, CA
Period6/13/056/17/05

All Science Journal Classification (ASJC) codes

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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