Characterization of Z-pinch plasmas for EUV light sources

S. Katsuki, H. Imamura, S. Akiyoshi, T. Namihira, T. Sakugawa, H. Akiyama, Kentaro Tomita, Kiichiro Uchino

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper describes the characterization of Z-pinch xenon plasmas for EUV sources. The plasmas were driven by a 15 J pulsed power generator, which delivers pulsed currents (35 kA, 120 ns) to the short circuit load. We have developed a time-resolved interferogram and a Thomson scattering system to characterize the Z-pinch plasmas. The interferogram using a pulsed Nd:YAG laser (532 nm, 7 ns) shows the temporal development of the radial profile of electron density. The electron density in the core plasma during pinch phase was 1.2 × 1019 cm-3. Preliminary result of the Thomson scattering measurement shows the electron temperature and density at the decay phase of the pinch process were 5.5 eV and 3 × 1017 cm -3, respectively.

Original languageEnglish
Title of host publication2005 IEEE Pulsed Power Conference, PPC
Pages864-867
Number of pages4
DOIs
Publication statusPublished - 2007
Event2005 IEEE Pulsed Power Conference, PPC - Monterey, CA, United States
Duration: Jun 13 2005Jun 17 2005

Other

Other2005 IEEE Pulsed Power Conference, PPC
CountryUnited States
CityMonterey, CA
Period6/13/056/17/05

Fingerprint

Light sources
Carrier concentration
Plasmas
Scattering
Electron temperature
Xenon
Short circuit currents
Lasers

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Katsuki, S., Imamura, H., Akiyoshi, S., Namihira, T., Sakugawa, T., Akiyama, H., ... Uchino, K. (2007). Characterization of Z-pinch plasmas for EUV light sources. In 2005 IEEE Pulsed Power Conference, PPC (pp. 864-867). [4084354] https://doi.org/10.1109/PPC.2005.300429

Characterization of Z-pinch plasmas for EUV light sources. / Katsuki, S.; Imamura, H.; Akiyoshi, S.; Namihira, T.; Sakugawa, T.; Akiyama, H.; Tomita, Kentaro; Uchino, Kiichiro.

2005 IEEE Pulsed Power Conference, PPC. 2007. p. 864-867 4084354.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Katsuki, S, Imamura, H, Akiyoshi, S, Namihira, T, Sakugawa, T, Akiyama, H, Tomita, K & Uchino, K 2007, Characterization of Z-pinch plasmas for EUV light sources. in 2005 IEEE Pulsed Power Conference, PPC., 4084354, pp. 864-867, 2005 IEEE Pulsed Power Conference, PPC, Monterey, CA, United States, 6/13/05. https://doi.org/10.1109/PPC.2005.300429
Katsuki S, Imamura H, Akiyoshi S, Namihira T, Sakugawa T, Akiyama H et al. Characterization of Z-pinch plasmas for EUV light sources. In 2005 IEEE Pulsed Power Conference, PPC. 2007. p. 864-867. 4084354 https://doi.org/10.1109/PPC.2005.300429
Katsuki, S. ; Imamura, H. ; Akiyoshi, S. ; Namihira, T. ; Sakugawa, T. ; Akiyama, H. ; Tomita, Kentaro ; Uchino, Kiichiro. / Characterization of Z-pinch plasmas for EUV light sources. 2005 IEEE Pulsed Power Conference, PPC. 2007. pp. 864-867
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