Circular motion control of an optically trapped microprobe for nano-position sensing

Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

As a position sensing probe for Nano-CMM which measures three-dimensional shapes of microparts, we propose a novel probing technique using circular motion of an optically trapped microsphere. In this report, a fundamental principle is described for sensing a coordinate on a work surface using a circular motion probe. The circular motion of the trapped sphere near a work surface becomes an ellipse compressed perpendicularly to the surface due to the change of viscous drag of the sphere. The elliptical orbit of the trapped sphere depends on a distance from the surface and a normal vector direction of the surface. By processing the elliptical orbit, the circular motion probe can detect a position and a plane normal vector of the work surface simultaneously. In order to verify feasibility of this method, fundamental experiments are carried out. The circular motion probe is approached to a vertical silicon cleavage surface. The behavior of the trapped sphere near the surface agrees well with the theory. Based on the elliptical orbit of the trapped sphere near the surface, a position and a plane normal vector of the surface are estimated. It is verified that the circular motion probe can detect a position of a work surface with resolution of better than 50nm and detect a plane normal vector of the surface.

Original languageEnglish
Title of host publicationOptical Trapping and Optical Micromanipulation IV
DOIs
Publication statusPublished - Dec 1 2007
EventOptical Trapping and Optical Micromanipulation IV - San Diego, CA, United States
Duration: Aug 26 2007Aug 29 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6644
ISSN (Print)0277-786X

Other

OtherOptical Trapping and Optical Micromanipulation IV
CountryUnited States
CitySan Diego, CA
Period8/26/078/29/07

Fingerprint

Circular motion
position sensing
Motion Control
Motion control
Sensing
Normal vector
Probe
elliptical orbits
probes
Orbits
Orbit
viscous drag
Coordinate measuring machines
Microspheres
Ellipse
ellipses
Silicon
Drag
cleavage

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Nagasaka, Y., Takaya, Y., & Hayashi, T. (2007). Circular motion control of an optically trapped microprobe for nano-position sensing. In Optical Trapping and Optical Micromanipulation IV [66441K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6644). https://doi.org/10.1117/12.734471

Circular motion control of an optically trapped microprobe for nano-position sensing. / Nagasaka, Yuto; Takaya, Yasuhiro; Hayashi, Terutake.

Optical Trapping and Optical Micromanipulation IV. 2007. 66441K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6644).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nagasaka, Y, Takaya, Y & Hayashi, T 2007, Circular motion control of an optically trapped microprobe for nano-position sensing. in Optical Trapping and Optical Micromanipulation IV., 66441K, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6644, Optical Trapping and Optical Micromanipulation IV, San Diego, CA, United States, 8/26/07. https://doi.org/10.1117/12.734471
Nagasaka Y, Takaya Y, Hayashi T. Circular motion control of an optically trapped microprobe for nano-position sensing. In Optical Trapping and Optical Micromanipulation IV. 2007. 66441K. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.734471
Nagasaka, Yuto ; Takaya, Yasuhiro ; Hayashi, Terutake. / Circular motion control of an optically trapped microprobe for nano-position sensing. Optical Trapping and Optical Micromanipulation IV. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).
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