Circular motion control of an optically trapped microprobe for nano-position sensing

Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

As a position sensing probe for Nano-CMM which measures three-dimensional shapes of microparts, we propose a novel probing technique using circular motion of an optically trapped microsphere. In this report, a fundamental principle is described for sensing a coordinate on a work surface using a circular motion probe. The circular motion of the trapped sphere near a work surface becomes an ellipse compressed perpendicularly to the surface due to the change of viscous drag of the sphere. The elliptical orbit of the trapped sphere depends on a distance from the surface and a normal vector direction of the surface. By processing the elliptical orbit, the circular motion probe can detect a position and a plane normal vector of the work surface simultaneously. In order to verify feasibility of this method, fundamental experiments are carried out. The circular motion probe is approached to a vertical silicon cleavage surface. The behavior of the trapped sphere near the surface agrees well with the theory. Based on the elliptical orbit of the trapped sphere near the surface, a position and a plane normal vector of the surface are estimated. It is verified that the circular motion probe can detect a position of a work surface with resolution of better than 50nm and detect a plane normal vector of the surface.

Original languageEnglish
Title of host publicationOptical Trapping and Optical Micromanipulation IV
DOIs
Publication statusPublished - Dec 1 2007
Externally publishedYes
EventOptical Trapping and Optical Micromanipulation IV - San Diego, CA, United States
Duration: Aug 26 2007Aug 29 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6644
ISSN (Print)0277-786X

Other

OtherOptical Trapping and Optical Micromanipulation IV
CountryUnited States
CitySan Diego, CA
Period8/26/078/29/07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Circular motion control of an optically trapped microprobe for nano-position sensing'. Together they form a unique fingerprint.

  • Cite this

    Nagasaka, Y., Takaya, Y., & Hayashi, T. (2007). Circular motion control of an optically trapped microprobe for nano-position sensing. In Optical Trapping and Optical Micromanipulation IV [66441K] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6644). https://doi.org/10.1117/12.734471