Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy

Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

Research output: Contribution to journalArticle

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Abstract

Combinatorial analysis has been demonstrated for the examination of plasma-surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon-oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) δ (plasma exposure time), corresponds to ion dose.

Original languageEnglish
Article number08JA02
JournalJapanese journal of applied physics
Volume49
Issue number8 PART 2
DOIs
Publication statusPublished - Aug 1 2010

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combinatorial analysis
polyethylene terephthalate
Beam plasma interactions
Polyethylene terephthalates
surface reactions
X ray photoelectron spectroscopy
photoelectron spectroscopy
Plasmas
plasma currents
ions
x rays
examination
argon
Ions
saturation
dosage
gradients
oxidation
Argon
oxygen

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy. / Takenaka, Kosuke; Cho, Ken; Setsuhara, Yuichi; Shiratani, Masaharu; Sekine, Makoto; Hori, Masaru.

In: Japanese journal of applied physics, Vol. 49, No. 8 PART 2, 08JA02, 01.08.2010.

Research output: Contribution to journalArticle

Takenaka, Kosuke ; Cho, Ken ; Setsuhara, Yuichi ; Shiratani, Masaharu ; Sekine, Makoto ; Hori, Masaru. / Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy. In: Japanese journal of applied physics. 2010 ; Vol. 49, No. 8 PART 2.
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