Combined device of optical microdisplacement sensor and PZT-actuated micromirror

K. Akase, Renshi Sawada, E. Higurashi, T. Kobayashi, R. Maeda, M. Inokuchi, S. Sanada, I. Ishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

A combined device of a PZT-film-actuated micromirror and microsensor that can detect linear movement and rotation angle of the mirror has been developed[1]. The micromirror is actuated by vertical movement of two PZT cantilevers formed as a unit on the right and left of the movable mirror and directly connected to it via hinges. By detecting reflected light diffused from a VCSEL (vertical-cavity surface-emitting laser) toward the mirror, using two photodiodes (one on each side), displacement and rotation angle are measured with high precision. Since this combined device can feed back the displacement and rotation angle obtained from the sensor, it can compensate for the hysteresis of PZT and therefore enable stable, high-precision optical beam control.

Original languageEnglish
Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages199-200
Number of pages2
DOIs
Publication statusPublished - Dec 1 2007
Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
Duration: Aug 12 2007Aug 16 2007

Publication series

Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
CountryTaiwan, Province of China
CityHualien
Period8/12/078/16/07

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Akase, K., Sawada, R., Higurashi, E., Kobayashi, T., Maeda, R., Inokuchi, M., Sanada, S., & Ishikawa, I. (2007). Combined device of optical microdisplacement sensor and PZT-actuated micromirror. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 199-200). [4373909] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373909