Combined device of optical microdisplacement sensor and PZT-actuated micromirror

K. Akase, Renshi Sawada, E. Higurashi, T. Kobayashi, R. Maeda, M. Inokuchi, S. Sanada, I. Ishikawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    7 Citations (Scopus)

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    Engineering & Materials Science