Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process

Morihisa Hoga, Kimio Itoh, Mikio Ishikawa, Naoko Kuwahara, Masaharu Fukuda, Nobuhito Toyama, Syuhei Kurokawa, Toshiro Doi

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy