Complementary exposure of 70 nm SoC devices in electron projection lithography

Hiroshi Yamashita, Isao Amemiya, Kunio Takeuchi, Hideki Masaoka, Kimitoshi Takahashi, Akihiro Ikeda, Yukinori Kuroki, Masaki Yamabe

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)2645-2649
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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