Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators

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Abstract

Micro-ring resonators have been widely utilized in silicon photonics. However they often exhibit a high sensitivity to ambient temperature fluctuations. In this letter, we have demonstrated a complementary metal-oxide-semiconductor compatible athermal micro-ring resonator made from titanium dioxide (TiO2) and silicon nitride (SiNx). We have exploited the negative thermo-optic coefficient of TiO2 to counterbalance the positive coefficient of SiNx. By a precise control over the TiO2 layer thickness, an athermal condition remarkably consistent with the simulation can be achieved. Therefore, a SiN x-TiO2 hybrid micro-ring resonator with a temperature dependent wavelength shift of 0.073 pm/ °C has been realized.

Original languageEnglish
Article number051106
JournalApplied Physics Letters
Volume102
Issue number5
DOIs
Publication statusPublished - Feb 4 2013

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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