Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

Micro-ring resonators have been widely utilized in silicon photonics. However they often exhibit a high sensitivity to ambient temperature fluctuations. In this letter, we have demonstrated a complementary metal-oxide-semiconductor compatible athermal micro-ring resonator made from titanium dioxide (TiO2) and silicon nitride (SiNx). We have exploited the negative thermo-optic coefficient of TiO2 to counterbalance the positive coefficient of SiNx. By a precise control over the TiO2 layer thickness, an athermal condition remarkably consistent with the simulation can be achieved. Therefore, a SiN x-TiO2 hybrid micro-ring resonator with a temperature dependent wavelength shift of 0.073 pm/ °C has been realized.

Original languageEnglish
Article number051106
JournalApplied Physics Letters
Volume102
Issue number5
DOIs
Publication statusPublished - Feb 4 2013

Fingerprint

silicon nitrides
titanium oxides
CMOS
resonators
rings
counterbalances
coefficients
ambient temperature
photonics
optics
sensitivity
shift
silicon
wavelengths
simulation
temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

@article{44286d3866404d6086c051aa95b322d1,
title = "Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators",
abstract = "Micro-ring resonators have been widely utilized in silicon photonics. However they often exhibit a high sensitivity to ambient temperature fluctuations. In this letter, we have demonstrated a complementary metal-oxide-semiconductor compatible athermal micro-ring resonator made from titanium dioxide (TiO2) and silicon nitride (SiNx). We have exploited the negative thermo-optic coefficient of TiO2 to counterbalance the positive coefficient of SiNx. By a precise control over the TiO2 layer thickness, an athermal condition remarkably consistent with the simulation can be achieved. Therefore, a SiN x-TiO2 hybrid micro-ring resonator with a temperature dependent wavelength shift of 0.073 pm/ °C has been realized.",
author = "Feng Qiu and Spring, {Andrew Mark} and Feng Yu and Shiyoshi Yokoyama",
year = "2013",
month = "2",
day = "4",
doi = "10.1063/1.4790440",
language = "English",
volume = "102",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "5",

}

TY - JOUR

T1 - Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators

AU - Qiu, Feng

AU - Spring, Andrew Mark

AU - Yu, Feng

AU - Yokoyama, Shiyoshi

PY - 2013/2/4

Y1 - 2013/2/4

N2 - Micro-ring resonators have been widely utilized in silicon photonics. However they often exhibit a high sensitivity to ambient temperature fluctuations. In this letter, we have demonstrated a complementary metal-oxide-semiconductor compatible athermal micro-ring resonator made from titanium dioxide (TiO2) and silicon nitride (SiNx). We have exploited the negative thermo-optic coefficient of TiO2 to counterbalance the positive coefficient of SiNx. By a precise control over the TiO2 layer thickness, an athermal condition remarkably consistent with the simulation can be achieved. Therefore, a SiN x-TiO2 hybrid micro-ring resonator with a temperature dependent wavelength shift of 0.073 pm/ °C has been realized.

AB - Micro-ring resonators have been widely utilized in silicon photonics. However they often exhibit a high sensitivity to ambient temperature fluctuations. In this letter, we have demonstrated a complementary metal-oxide-semiconductor compatible athermal micro-ring resonator made from titanium dioxide (TiO2) and silicon nitride (SiNx). We have exploited the negative thermo-optic coefficient of TiO2 to counterbalance the positive coefficient of SiNx. By a precise control over the TiO2 layer thickness, an athermal condition remarkably consistent with the simulation can be achieved. Therefore, a SiN x-TiO2 hybrid micro-ring resonator with a temperature dependent wavelength shift of 0.073 pm/ °C has been realized.

UR - http://www.scopus.com/inward/record.url?scp=84874086463&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84874086463&partnerID=8YFLogxK

U2 - 10.1063/1.4790440

DO - 10.1063/1.4790440

M3 - Article

AN - SCOPUS:84874086463

VL - 102

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 5

M1 - 051106

ER -