Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition

Yukio Watanabe, Y. Seo, M. Tanamura, H. Asami, Y. Matsumoto

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Compositional distributions of films laser deposited in vacuo at energy densities <1 J/cm 2 were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed-laser-deposition rapid-sequential-pulsed-laser deposition, is introduced. The dependence of YBa 2 Cu 3 O 7 films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition.

Original languageEnglish
Pages (from-to)5126-5135
Number of pages10
JournalJournal of Applied Physics
Volume78
Issue number8
DOIs
Publication statusPublished - Dec 1 1995
Externally publishedYes

Fingerprint

pulsed laser deposition
flux density
evaporation
lasers
particulates
precipitates
elimination
pulsed lasers
electrical properties
retarding
decomposition

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition. / Watanabe, Yukio; Seo, Y.; Tanamura, M.; Asami, H.; Matsumoto, Y.

In: Journal of Applied Physics, Vol. 78, No. 8, 01.12.1995, p. 5126-5135.

Research output: Contribution to journalArticle

Watanabe, Yukio ; Seo, Y. ; Tanamura, M. ; Asami, H. ; Matsumoto, Y. / Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition. In: Journal of Applied Physics. 1995 ; Vol. 78, No. 8. pp. 5126-5135.
@article{147dae0fb1ea44f192764d2f528b9915,
title = "Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition",
abstract = "Compositional distributions of films laser deposited in vacuo at energy densities <1 J/cm 2 were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed-laser-deposition rapid-sequential-pulsed-laser deposition, is introduced. The dependence of YBa 2 Cu 3 O 7 films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition.",
author = "Yukio Watanabe and Y. Seo and M. Tanamura and H. Asami and Y. Matsumoto",
year = "1995",
month = "12",
day = "1",
doi = "10.1063/1.359744",
language = "English",
volume = "78",
pages = "5126--5135",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "8",

}

TY - JOUR

T1 - Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition

AU - Watanabe, Yukio

AU - Seo, Y.

AU - Tanamura, M.

AU - Asami, H.

AU - Matsumoto, Y.

PY - 1995/12/1

Y1 - 1995/12/1

N2 - Compositional distributions of films laser deposited in vacuo at energy densities <1 J/cm 2 were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed-laser-deposition rapid-sequential-pulsed-laser deposition, is introduced. The dependence of YBa 2 Cu 3 O 7 films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition.

AB - Compositional distributions of films laser deposited in vacuo at energy densities <1 J/cm 2 were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed-laser-deposition rapid-sequential-pulsed-laser deposition, is introduced. The dependence of YBa 2 Cu 3 O 7 films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition.

UR - http://www.scopus.com/inward/record.url?scp=0346981844&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0346981844&partnerID=8YFLogxK

U2 - 10.1063/1.359744

DO - 10.1063/1.359744

M3 - Article

VL - 78

SP - 5126

EP - 5135

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 8

ER -