Compositional distribution of laser-deposited films and rapid sequential pulsed laser deposition

Compositional distributions of films laser deposited in vacuo at energy densities <1 J/cm² were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed-laser-deposition rapid-sequential-pulsed-laser deposition, is introduced. The dependence of YBa₂Cu₃O₇ films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition.