Compositionally gradient thin film deposition by pulse laser ablation under high gravity

Takashi Nishiyama, Takashi Kajiwara, Kunihito Nagayama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A compositionally graded thin film of Fe/Si was fabricated by a gravity-assisted pulsed laser ablation (GAPLA) system. By this method, a compositionally graded structure along gravity direction was successfully produced under a gravity field of 5,400 G. Systematic experiments were conducted by several parameters, including gravity, distance between target and substrate, and laser fluence in case of typical target material of iron disilicide (FeSi2). We demonstrate that the atomic fraction of Fe, the heavier component of the thin film, showed increasing spatial distribution with the direction of gravity. Relatively high laser fluence as well as a very narrow space between the target and the substrate are found to be essential to the compositionally gradient of thin film.

Original languageEnglish
Title of host publicationDiffusion in Materials - DIMAT 2011
PublisherTrans Tech Publications Ltd
Pages559-563
Number of pages5
Volume323-325
ISBN (Print)9783037853979
DOIs
Publication statusPublished - Jan 1 2012
Event8th International Conference on Diffusion in Materials, DIMAT 2011 - Dijon, France
Duration: Jul 3 2011Jul 8 2011

Other

Other8th International Conference on Diffusion in Materials, DIMAT 2011
CountryFrance
CityDijon
Period7/3/117/8/11

All Science Journal Classification (ASJC) codes

  • Radiation
  • Materials Science(all)
  • Condensed Matter Physics

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  • Cite this

    Nishiyama, T., Kajiwara, T., & Nagayama, K. (2012). Compositionally gradient thin film deposition by pulse laser ablation under high gravity. In Diffusion in Materials - DIMAT 2011 (Vol. 323-325, pp. 559-563). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/DDF.323-325.559