Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

Nobuki Ozawa, Miho Nakamura, Kentaro Kawaguchi, Takeshi Ishikawa, Yuji Higuchi, Momoji Kubo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication5th World Tribology Congress, WTC 2013
PublisherPolitecnico di Torino (DIMEAS)
Pages1915-1916
Number of pages2
ISBN (Electronic)9781634393522
Publication statusPublished - 2014
Externally publishedYes
Event5th World Tribology Congress, WTC 2013 - Torino, Italy
Duration: Sep 8 2013Sep 13 2013

Publication series

Name5th World Tribology Congress, WTC 2013
Volume3

Other

Other5th World Tribology Congress, WTC 2013
Country/TerritoryItaly
CityTorino
Period9/8/139/13/13

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Mechanical Engineering

Cite this