TY - JOUR
T1 - Computer simulation of nano-pore formation in EB-PVD thermal barrier coatings
AU - Yoshiya, M.
AU - Wada, K.
AU - Jang, B. K.
AU - Matsubara, H.
N1 - Funding Information:
This work was performed as a part of the Nanostructure Coating Project funded by the New Energy and Industrial Technology Development Organization (NEDO). The authors thank Dr. C.A.J. Fisher for critical reading of the manuscript.
PY - 2004/10/22
Y1 - 2004/10/22
N2 - Two-dimensional Monte Carlo simulations have been conducted to investigate the mechanism of nano-pore formation during film deposition. The macroscopic structure obtained from the simulation is in good agreement with experiments. It is found that random accumulation of vapor phase particles creates pores that are inclined away from the incident direction at angles dependent on the ratio of the parallel and perpendicular accumulation rates. When the incident direction is inclined away from the surface normal, the pore orientation angle (POA) distribution exhibits a single peak rather than two peaks due to self-shadowing. Both the area and the orientation of the intracolumnar pores are analyzed. The results indicate that the pore configuration can be altered by changing the physical parameters of the deposition process.
AB - Two-dimensional Monte Carlo simulations have been conducted to investigate the mechanism of nano-pore formation during film deposition. The macroscopic structure obtained from the simulation is in good agreement with experiments. It is found that random accumulation of vapor phase particles creates pores that are inclined away from the incident direction at angles dependent on the ratio of the parallel and perpendicular accumulation rates. When the incident direction is inclined away from the surface normal, the pore orientation angle (POA) distribution exhibits a single peak rather than two peaks due to self-shadowing. Both the area and the orientation of the intracolumnar pores are analyzed. The results indicate that the pore configuration can be altered by changing the physical parameters of the deposition process.
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U2 - 10.1016/j.surfcoat.2004.03.056
DO - 10.1016/j.surfcoat.2004.03.056
M3 - Article
AN - SCOPUS:4544223029
SN - 0257-8972
VL - 187
SP - 399
EP - 407
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - 2-3
ER -