We performed homo-growth of diamond thin films in an oxygen and hydrogen atmospheres on various oriented diamond substrates by pulsed laser deposition (PLD). The optimum ambient pressures were 50-70 mTorr for oxygen and 4 Torr for hydrogen, respectively. At 50 mTorr oxygen, diamond thin films, which consist of crystallites with diameters of 0.5-1 μm, were grown at a deposition rate of 18 nm/min. The diamond growth in the oxygen atmosphere was strongly influenced by the substrate orientation. However, at 4 Torr hydrogen, extremely smooth diamond films, which consist of non-oriented diamond crystallites with diameters of 20 nm at most, were grown at a deposition rate of 80 nm/min. The ambient hydrogen has an important role on the growth of nanocrystalline diamond. Based on these results, the diamond growth processes for respective atmospheres were discussed.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanical Engineering
- Materials Chemistry
- Electrical and Electronic Engineering