Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition

Takeshi Hara, Tsuyoshi Yoshitake, Tomohito Fukugawa, Ling yun Zhu, Masaru Itakura, Noriyuki Kuwano, Yoshitsugu Tomokiyo, Kunihito Nagayama

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We performed homo-growth of diamond thin films in an oxygen and hydrogen atmospheres on various oriented diamond substrates by pulsed laser deposition (PLD). The optimum ambient pressures were 50-70 mTorr for oxygen and 4 Torr for hydrogen, respectively. At 50 mTorr oxygen, diamond thin films, which consist of crystallites with diameters of 0.5-1 μm, were grown at a deposition rate of 18 nm/min. The diamond growth in the oxygen atmosphere was strongly influenced by the substrate orientation. However, at 4 Torr hydrogen, extremely smooth diamond films, which consist of non-oriented diamond crystallites with diameters of 20 nm at most, were grown at a deposition rate of 80 nm/min. The ambient hydrogen has an important role on the growth of nanocrystalline diamond. Based on these results, the diamond growth processes for respective atmospheres were discussed.

Original languageEnglish
Pages (from-to)622-626
Number of pages5
JournalDiamond and Related Materials
Volume13
Issue number4-8
DOIs
Publication statusPublished - Apr 1 2004

Fingerprint

Diamond
Diamond films
Film growth
Pulsed laser deposition
Hydrogen
Diamonds
Oxygen
Substrates
Deposition rates
Crystallites
Thin films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition. / Hara, Takeshi; Yoshitake, Tsuyoshi; Fukugawa, Tomohito; Zhu, Ling yun; Itakura, Masaru; Kuwano, Noriyuki; Tomokiyo, Yoshitsugu; Nagayama, Kunihito.

In: Diamond and Related Materials, Vol. 13, No. 4-8, 01.04.2004, p. 622-626.

Research output: Contribution to journalArticle

Hara, Takeshi ; Yoshitake, Tsuyoshi ; Fukugawa, Tomohito ; Zhu, Ling yun ; Itakura, Masaru ; Kuwano, Noriyuki ; Tomokiyo, Yoshitsugu ; Nagayama, Kunihito. / Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition. In: Diamond and Related Materials. 2004 ; Vol. 13, No. 4-8. pp. 622-626.
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AU - Itakura, Masaru

AU - Kuwano, Noriyuki

AU - Tomokiyo, Yoshitsugu

AU - Nagayama, Kunihito

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