Abstract
We performed homo-growth of diamond thin films in an oxygen and hydrogen atmospheres on various oriented diamond substrates by pulsed laser deposition (PLD). The optimum ambient pressures were 50-70 mTorr for oxygen and 4 Torr for hydrogen, respectively. At 50 mTorr oxygen, diamond thin films, which consist of crystallites with diameters of 0.5-1 μm, were grown at a deposition rate of 18 nm/min. The diamond growth in the oxygen atmosphere was strongly influenced by the substrate orientation. However, at 4 Torr hydrogen, extremely smooth diamond films, which consist of non-oriented diamond crystallites with diameters of 20 nm at most, were grown at a deposition rate of 80 nm/min. The ambient hydrogen has an important role on the growth of nanocrystalline diamond. Based on these results, the diamond growth processes for respective atmospheres were discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 622-626 |
| Number of pages | 5 |
| Journal | Diamond and Related Materials |
| Volume | 13 |
| Issue number | 4-8 |
| DOIs | |
| Publication status | Published - Apr 1 2004 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Chemistry(all)
- Mechanical Engineering
- Materials Chemistry
- Electrical and Electronic Engineering
Cite this
Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition. / Hara, Takeshi; Yoshitake, Tsuyoshi; Fukugawa, Tomohito; Zhu, Ling yun; Itakura, Masaru; Kuwano, Noriyuki; Tomokiyo, Yoshitsugu; Nagayama, Kunihito.
In: Diamond and Related Materials, Vol. 13, No. 4-8, 01.04.2004, p. 622-626.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Consideration of diamond film growth on various orientation substrates of diamond in oxygen and hydrogen atmospheres by reactive pulsed laser deposition
AU - Hara, Takeshi
AU - Yoshitake, Tsuyoshi
AU - Fukugawa, Tomohito
AU - Zhu, Ling yun
AU - Itakura, Masaru
AU - Kuwano, Noriyuki
AU - Tomokiyo, Yoshitsugu
AU - Nagayama, Kunihito
PY - 2004/4/1
Y1 - 2004/4/1
N2 - We performed homo-growth of diamond thin films in an oxygen and hydrogen atmospheres on various oriented diamond substrates by pulsed laser deposition (PLD). The optimum ambient pressures were 50-70 mTorr for oxygen and 4 Torr for hydrogen, respectively. At 50 mTorr oxygen, diamond thin films, which consist of crystallites with diameters of 0.5-1 μm, were grown at a deposition rate of 18 nm/min. The diamond growth in the oxygen atmosphere was strongly influenced by the substrate orientation. However, at 4 Torr hydrogen, extremely smooth diamond films, which consist of non-oriented diamond crystallites with diameters of 20 nm at most, were grown at a deposition rate of 80 nm/min. The ambient hydrogen has an important role on the growth of nanocrystalline diamond. Based on these results, the diamond growth processes for respective atmospheres were discussed.
AB - We performed homo-growth of diamond thin films in an oxygen and hydrogen atmospheres on various oriented diamond substrates by pulsed laser deposition (PLD). The optimum ambient pressures were 50-70 mTorr for oxygen and 4 Torr for hydrogen, respectively. At 50 mTorr oxygen, diamond thin films, which consist of crystallites with diameters of 0.5-1 μm, were grown at a deposition rate of 18 nm/min. The diamond growth in the oxygen atmosphere was strongly influenced by the substrate orientation. However, at 4 Torr hydrogen, extremely smooth diamond films, which consist of non-oriented diamond crystallites with diameters of 20 nm at most, were grown at a deposition rate of 80 nm/min. The ambient hydrogen has an important role on the growth of nanocrystalline diamond. Based on these results, the diamond growth processes for respective atmospheres were discussed.
UR - http://www.scopus.com/inward/record.url?scp=2442507833&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2442507833&partnerID=8YFLogxK
U2 - 10.1016/j.diamond.2003.10.078
DO - 10.1016/j.diamond.2003.10.078
M3 - Article
VL - 13
SP - 622
EP - 626
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 4-8
ER -