Construction of Response Function of TES X-ray Microcalorimeter for STEM-EDS

Tasuku Hayashi, Haruka Muramatsu, Keisei Maehisa, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Keisuke Maehata, Toru Hara

Research output: Contribution to journalArticle

Abstract

A quantitative microanalysis of astromaterials (e.g., meteorite, returned samples from asteroids) is a key technology to understand the history of our solar system formation. To fulfill this, we developed an energy-dispersive X-ray spectroscopy (EDS) using a transition-edge sensor (TES) microcalorimeterarray on a scanning transmission electron microscope (STEM) for material analysis. To reduce the systematic errors of a spectral analysis, we investigated and constructed the response function of the STEM-EDS system, which consists of detection efficiency and a two-dimensional response matrix. The latter represents the pulse-height redistribution functions of the incident photons of different energies. Using the constructed response function, we demonstrated the quantitative determination of SiO2 film and confirmed that the number-density ratio of oxygen to silicon (=2.29+0.32-0.29) is consistent with the expected value of 2 within the statistical errors. We further study the systematic errors of the concentration determination with simulations. We analyze the simulated spectra of TES-EDS and SDD (silicon drift detector)-EDS without a priori knowledge about the continuum spectra and find that the systematic deviations of parameters from the model values are smaller than 1% for TES-EDS and larger than 10% for SDD-EDS.

Original languageEnglish
Article number8654629
JournalIEEE Transactions on Applied Superconductivity
Volume29
Issue number5
DOIs
Publication statusPublished - Aug 1 2019

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calorimeters
Energy dispersive spectroscopy
Electron microscopes
electron microscopes
Scanning
systematic errors
X rays
scanning
sensors
Sensors
silicon
Silicon
x rays
Systematic errors
detectors
meteorites
pulse amplitude
asteroids
microanalysis
solar system

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Construction of Response Function of TES X-ray Microcalorimeter for STEM-EDS. / Hayashi, Tasuku; Muramatsu, Haruka; Maehisa, Keisei; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa; Maehata, Keisuke; Hara, Toru.

In: IEEE Transactions on Applied Superconductivity, Vol. 29, No. 5, 8654629, 01.08.2019.

Research output: Contribution to journalArticle

Hayashi, Tasuku ; Muramatsu, Haruka ; Maehisa, Keisei ; Yamasaki, Noriko Y. ; Mitsuda, Kazuhisa ; Maehata, Keisuke ; Hara, Toru. / Construction of Response Function of TES X-ray Microcalorimeter for STEM-EDS. In: IEEE Transactions on Applied Superconductivity. 2019 ; Vol. 29, No. 5.
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