Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki; Kazunori Koga; Giichiro Uchida; Naho Itagaki; Daisuke Yamashita; Hidefumi Matsuzaki; Masaharu Shiratani

doi:10.1016/j.tsf.2012.07.059

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

Original language	English
Pages (from-to)	76-79
Number of pages	4
Journal	Thin Solid Films
Volume	523
DOIs	https://doi.org/10.1016/j.tsf.2012.07.059
Publication status	Published - Nov 15 2012

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2012.07.059

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title = "Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage",

abstract = "We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.",

author = "Kunihiro Kamataki and Kazunori Koga and Giichiro Uchida and Naho Itagaki and Daisuke Yamashita and Hidefumi Matsuzaki and Masaharu Shiratani",

note = "Funding Information: This work was partially supported by a Grant-in-Aid for Scientific Research on Innovative Areas (no. 2109 ) of MEXT, Japan.",

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doi = "10.1016/j.tsf.2012.07.059",

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T1 - Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

AU - Kamataki, Kunihiro

AU - Koga, Kazunori

AU - Uchida, Giichiro

AU - Itagaki, Naho

AU - Yamashita, Daisuke

AU - Matsuzaki, Hidefumi

AU - Shiratani, Masaharu

N1 - Funding Information: This work was partially supported by a Grant-in-Aid for Scientific Research on Innovative Areas (no. 2109 ) of MEXT, Japan.

PY - 2012/11/15

Y1 - 2012/11/15

N2 - We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

AB - We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

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JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

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Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Abstract

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