Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki; Kazunori Koga; Giichiro Uchida; Naho Itagaki; Daisuke Yamashita; Hidefumi Matsuzaki; Masaharu Shiratani

doi:10.1016/j.tsf.2012.07.059

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kunihiro Kamataki, Kazunori Koga, Giichiro Uchida, Naho Itagaki, Daisuke Yamashita, Hidefumi Matsuzaki, Masaharu Shiratani

Research output: Contribution to journal › Article

5 Citations (Scopus)

Abstract

We investigate uniformity of radial density profile of nano-particles in capacitively-coupled radio frequency discharge with an amplitude modulation (AM) of rf discharge voltage, by a two-dimensional laser light scattering method. Their densities at the center and that at the edge of the electrode increase by 3 and 24 times when the amplitude modulation level increases from 0 (without AM) to 30%. The uniformity of radial density profile of nano-particles is significantly improved by using the AM method.

Original language	English
Pages (from-to)	76-79
Number of pages	4
Journal	Thin Solid Films
Volume	523
DOIs	https://doi.org/10.1016/j.tsf.2012.07.059
Publication status	Published - Nov 15 2012

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Cite this

Kamataki, K., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H., & Shiratani, M. (2012). Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage. Thin Solid Films, 523, 76-79. https://doi.org/10.1016/j.tsf.2012.07.059

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage. / Kamataki, Kunihiro ; Koga, Kazunori; Uchida, Giichiro; Itagaki, Naho; Yamashita, Daisuke; Matsuzaki, Hidefumi; Shiratani, Masaharu.

In: Thin Solid Films, Vol. 523, 15.11.2012, p. 76-79.

Research output: Contribution to journal › Article

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10.1016/j.tsf.2012.07.059