Original language | English |
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Pages (from-to) | 1079-1087 |
Number of pages | 9 |
Journal | Shinku/Journal of the Vacuum Society of Japan |
Volume | 43 |
Issue number | 12 |
DOIs | |
Publication status | Published - Jan 2000 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering