Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas

Ren Zhou; Kento Mori; Hiroshi Ohtomo; Daisuke Yamashita; Hyunwoong Seo; Naho Itagaki; Kazunori Koga; Masaharu Shiratan

doi:10.4028/www.scientific.net/MSF.941.2104

Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas

Ren Zhou, Kento Mori, Hiroshi Ohtomo, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratan

Electronic Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.

Original language	English
Title of host publication	THERMEC 2018
Editors	Tara Chandra, Mihail Ionescu, R. Shabadi, C. Richard, M. Jeandin
Publisher	Trans Tech Publications Ltd
Pages	2104-2108
Number of pages	5
ISBN (Print)	9783035712087
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.941.2104
Publication status	Published - Jan 1 2018
Event	10th International Conference on Processing and Manufacturing of Advanced Materials, 2018 - Paris, France Duration: Jul 9 2018 → Jul 13 2018

Publication series

Name	Materials Science Forum
Volume	941 MSF
ISSN (Print)	0255-5476

Conference

Conference	10th International Conference on Processing and Manufacturing of Advanced Materials, 2018
Country	France
City	Paris
Period	7/9/18 → 7/13/18

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All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

Zhou, R., Mori, K., Ohtomo, H., Yamashita, D., Seo, H., Itagaki, N., ... Shiratan, M. (2018). Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. In T. Chandra, M. Ionescu, R. Shabadi, C. Richard, & M. Jeandin (Eds.), THERMEC 2018 (pp. 2104-2108). (Materials Science Forum; Vol. 941 MSF). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.941.2104

Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. / Zhou, Ren; Mori, Kento; Ohtomo, Hiroshi; Yamashita, Daisuke; Seo, Hyunwoong; Itagaki, Naho ; Koga, Kazunori; Shiratan, Masaharu.

THERMEC 2018. ed. / Tara Chandra; Mihail Ionescu; R. Shabadi; C. Richard; M. Jeandin. Trans Tech Publications Ltd, 2018. p. 2104-2108 (Materials Science Forum; Vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhou, R, Mori, K, Ohtomo, H, Yamashita, D, Seo, H, Itagaki, N , Koga, K & Shiratan, M 2018, Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. in T Chandra, M Ionescu, R Shabadi, C Richard & M Jeandin (eds), THERMEC 2018. Materials Science Forum, vol. 941 MSF, Trans Tech Publications Ltd, pp. 2104-2108, 10th International Conference on Processing and Manufacturing of Advanced Materials, 2018, Paris, France, 7/9/18. https://doi.org/10.4028/www.scientific.net/MSF.941.2104

Zhou R, Mori K, Ohtomo H, Yamashita D, Seo H, Itagaki N et al. Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. In Chandra T, Ionescu M, Shabadi R, Richard C, Jeandin M, editors, THERMEC 2018. Trans Tech Publications Ltd. 2018. p. 2104-2108. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.941.2104

Zhou, Ren ; Mori, Kento ; Ohtomo, Hiroshi ; Yamashita, Daisuke ; Seo, Hyunwoong ; Itagaki, Naho ; Koga, Kazunori ; Shiratan, Masaharu. / Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. THERMEC 2018. editor / Tara Chandra ; Mihail Ionescu ; R. Shabadi ; C. Richard ; M. Jeandin. Trans Tech Publications Ltd, 2018. pp. 2104-2108 (Materials Science Forum).

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10.4028/www.scientific.net/MSF.941.2104