Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas

Ren Zhou, Kento Mori, Hiroshi Ohtomo, Daisuke Yamashita, Hyunwoong Seo, Naho Itagaki, Kazunori Koga, Masaharu Shiratan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.

Original languageEnglish
Title of host publicationTHERMEC 2018
EditorsTara Chandra, Mihail Ionescu, R. Shabadi, C. Richard, M. Jeandin
PublisherTrans Tech Publications Ltd
Pages2104-2108
Number of pages5
ISBN (Print)9783035712087
DOIs
Publication statusPublished - Jan 1 2018
Event10th International Conference on Processing and Manufacturing of Advanced Materials, 2018 - Paris, France
Duration: Jul 9 2018Jul 13 2018

Publication series

NameMaterials Science Forum
Volume941 MSF
ISSN (Print)0255-5476

Conference

Conference10th International Conference on Processing and Manufacturing of Advanced Materials, 2018
CountryFrance
CityParis
Period7/9/187/13/18

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Zhou, R., Mori, K., Ohtomo, H., Yamashita, D., Seo, H., Itagaki, N., ... Shiratan, M. (2018). Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. In T. Chandra, M. Ionescu, R. Shabadi, C. Richard, & M. Jeandin (Eds.), THERMEC 2018 (pp. 2104-2108). (Materials Science Forum; Vol. 941 MSF). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.941.2104