@inproceedings{d84c035c88404e1aa1f7843377ae4f3a,
title = "Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas",
abstract = "We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.",
author = "Ren Zhou and Kento Mori and Hiroshi Ohtomo and Daisuke Yamashita and Hyunwoong Seo and Naho Itagaki and Kazunori Koga and Masaharu Shiratan",
year = "2018",
month = jan,
day = "1",
doi = "10.4028/www.scientific.net/MSF.941.2104",
language = "English",
isbn = "9783035712087",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "2104--2108",
editor = "R. Shabadi and Mihail Ionescu and M. Jeandin and C. Richard and Tara Chandra",
booktitle = "THERMEC 2018",
note = "10th International Conference on Processing and Manufacturing of Advanced Materials, 2018 ; Conference date: 09-07-2018 Through 13-07-2018",
}