Abstract
We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.
| Original language | English |
|---|---|
| Title of host publication | THERMEC 2018 |
| Editors | Tara Chandra, Mihail Ionescu, R. Shabadi, C. Richard, M. Jeandin |
| Publisher | Trans Tech Publications Ltd |
| Pages | 2104-2108 |
| Number of pages | 5 |
| ISBN (Print) | 9783035712087 |
| DOIs | |
| Publication status | Published - Jan 1 2018 |
| Event | 10th International Conference on Processing and Manufacturing of Advanced Materials, 2018 - Paris, France Duration: Jul 9 2018 → Jul 13 2018 |
Publication series
| Name | Materials Science Forum |
|---|---|
| Volume | 941 MSF |
| ISSN (Print) | 0255-5476 |
Conference
| Conference | 10th International Conference on Processing and Manufacturing of Advanced Materials, 2018 |
|---|---|
| Country | France |
| City | Paris |
| Period | 7/9/18 → 7/13/18 |
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All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Cite this
Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas. / Zhou, Ren; Mori, Kento; Ohtomo, Hiroshi; Yamashita, Daisuke; Seo, Hyunwoong; Itagaki, Naho; Koga, Kazunori; Shiratan, Masaharu.
THERMEC 2018. ed. / Tara Chandra; Mihail Ionescu; R. Shabadi; C. Richard; M. Jeandin. Trans Tech Publications Ltd, 2018. p. 2104-2108 (Materials Science Forum; Vol. 941 MSF).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas
AU - Zhou, Ren
AU - Mori, Kento
AU - Ohtomo, Hiroshi
AU - Yamashita, Daisuke
AU - Seo, Hyunwoong
AU - Itagaki, Naho
AU - Koga, Kazunori
AU - Shiratan, Masaharu
PY - 2018/1/1
Y1 - 2018/1/1
N2 - We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.
AB - We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.
UR - http://www.scopus.com/inward/record.url?scp=85064071509&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85064071509&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.941.2104
DO - 10.4028/www.scientific.net/MSF.941.2104
M3 - Conference contribution
AN - SCOPUS:85064071509
SN - 9783035712087
T3 - Materials Science Forum
SP - 2104
EP - 2108
BT - THERMEC 2018
A2 - Chandra, Tara
A2 - Ionescu, Mihail
A2 - Shabadi, R.
A2 - Richard, C.
A2 - Jeandin, M.
PB - Trans Tech Publications Ltd
ER -