TY - GEN
T1 - Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas
AU - Zhou, Ren
AU - Mori, Kento
AU - Ohtomo, Hiroshi
AU - Yamashita, Daisuke
AU - Seo, Hyunwoong
AU - Itagaki, Naho
AU - Koga, Kazunori
AU - Shiratan, Masaharu
N1 - Funding Information:
This work was partly supported by the JSPS KAKENHI Grant Number JP26246036 and the Collaborative Research Program of the Research Institute for Applied Mechanics, Kyushu University. The authors would like to thank Prof. Sanae-I Itoh, Prof. Shigeru Inagaki from Kyushu Univ. and Prof. Kimitaka Itoh, Dr. Tatsuya Kobayashi from NIFS for their helpful discussions and comments.
Publisher Copyright:
© 2018 Trans Tech Publications, Switzerland.
PY - 2018
Y1 - 2018
N2 - We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.
AB - We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.
UR - http://www.scopus.com/inward/record.url?scp=85064071509&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85064071509&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.941.2104
DO - 10.4028/www.scientific.net/MSF.941.2104
M3 - Conference contribution
AN - SCOPUS:85064071509
SN - 9783035712087
T3 - Materials Science Forum
SP - 2104
EP - 2108
BT - THERMEC 2018
A2 - Shabadi, R.
A2 - Ionescu, Mihail
A2 - Jeandin, M.
A2 - Richard, C.
A2 - Chandra, Tara
PB - Trans Tech Publications Ltd
T2 - 10th International Conference on Processing and Manufacturing of Advanced Materials, 2018
Y2 - 9 July 2018 through 13 July 2018
ER -