Cross sections for medium energy He ions scattered from Hf and Au atoms

Tomoaki Nishimura, Kei Mitsuhara, Anton Visikovskiy, Yoshiaki Kido

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.

Original languageEnglish
Pages (from-to)5-9
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume280
DOIs
Publication statusPublished - Jun 1 2012
Externally publishedYes

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scattering cross sections
Atoms
cross sections
Ions
Scattering
atoms
ions
ion scattering
ambiguity
ultrahigh vacuum
Elastic scattering
energy
emerging
analyzers
backscattering
Rutherford backscattering spectroscopy
elastic scattering
Ultrahigh vacuum
Wave functions
wave functions

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this

Cross sections for medium energy He ions scattered from Hf and Au atoms. / Nishimura, Tomoaki; Mitsuhara, Kei; Visikovskiy, Anton; Kido, Yoshiaki.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 280, 01.06.2012, p. 5-9.

Research output: Contribution to journalArticle

@article{9b44ba3c4e3b4b1399a3b7a2c1beb0c3,
title = "Cross sections for medium energy He ions scattered from Hf and Au atoms",
abstract = "The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.",
author = "Tomoaki Nishimura and Kei Mitsuhara and Anton Visikovskiy and Yoshiaki Kido",
year = "2012",
month = "6",
day = "1",
doi = "10.1016/j.nimb.2012.02.030",
language = "English",
volume = "280",
pages = "5--9",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Cross sections for medium energy He ions scattered from Hf and Au atoms

AU - Nishimura, Tomoaki

AU - Mitsuhara, Kei

AU - Visikovskiy, Anton

AU - Kido, Yoshiaki

PY - 2012/6/1

Y1 - 2012/6/1

N2 - The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.

AB - The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.

UR - http://www.scopus.com/inward/record.url?scp=84860299644&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860299644&partnerID=8YFLogxK

U2 - 10.1016/j.nimb.2012.02.030

DO - 10.1016/j.nimb.2012.02.030

M3 - Article

AN - SCOPUS:84860299644

VL - 280

SP - 5

EP - 9

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -