Abstract
The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.
| Original language | English |
|---|---|
| Pages (from-to) | 5-9 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 280 |
| DOIs | |
| Publication status | Published - Jun 1 2012 |
| Externally published | Yes |
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All Science Journal Classification (ASJC) codes
- Nuclear and High Energy Physics
- Instrumentation
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Cross sections for medium energy He ions scattered from Hf and Au atoms. / Nishimura, Tomoaki; Mitsuhara, Kei; Visikovskiy, Anton; Kido, Yoshiaki.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 280, 01.06.2012, p. 5-9.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Cross sections for medium energy He ions scattered from Hf and Au atoms
AU - Nishimura, Tomoaki
AU - Mitsuhara, Kei
AU - Visikovskiy, Anton
AU - Kido, Yoshiaki
PY - 2012/6/1
Y1 - 2012/6/1
N2 - The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.
AB - The elastic scattering cross sections for medium energy He ions incident on Ni, Hf and Au atoms were measured precisely using a toroidal electrostatic analyzer. We prepared the targets of Ni(∼1 nm)/HfO 2(1.5 nm)/Si(0 0 1) and Ni(∼1 nm)/Au(∼0.5 nm)/Si(1 1 1) and performed in situ ion scattering measurement under ultrahigh vacuum condition. The absolute amounts of Ni, Hf and Au were determined by Rutherford backscattering using 1.5 MeV He ions at a scattering angle of 150°. The scattering cross sections for Hf and Au were normalized by those for Ni to avoid the ambiguities of the number of incident particles, solid angle subtended by a detector, detection efficiency and the He + fractions for the emerging He ions from the surfaces. The results obtained are compared with the simple Lee-Hart formula and the calculated values using the Molire and ZBL potentials and the potentials derived from the Hartree-Fock-Slater wave functions.
UR - http://www.scopus.com/inward/record.url?scp=84860299644&partnerID=8YFLogxK
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U2 - 10.1016/j.nimb.2012.02.030
DO - 10.1016/j.nimb.2012.02.030
M3 - Article
AN - SCOPUS:84860299644
VL - 280
SP - 5
EP - 9
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
ER -