Crystallization processes of amorphous Si during excimer laser annealing in complete-melting and near-complete-melting conditions: A molecular dynamics study

Tomohiko Ogata, Takanori Mitani, Shinji Munetoh, Teruaki Motooka

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We investigated crystallization processes of amorphous Si (a-Si) during the excimer laser annealing in the complete-melting and near-complete-melting conditions by using molecular dynamics simulations. The initial a-Si configuration was prepared by quenching liquid Si (l-Si) in a MD cell with a size of 50 × 50 × 150 Å3 composed of 18666 atoms. KrF excimer laser (wavelength: 248nm) annealing processes of a-Si were calculated by taking account of the change in the optical constant upon melting during a laser pulse shot with the intensity Io exp[-(t-t 0)22](Io: laser fluence, t: irradiation time). The refractive indices of a-Si and l-Si were set at n+ik=1.0+3.0i and n+ik=1.8+3.0i, respectively. The simulated results well reproduced the observed melting rate and the near-complete-melting and complete-melting conditions were obtained for Io - 160mJ/cm 2 and 180mJ/cm2, respectively. It was found that larger grains were obtained in the near-complete-melting condition. Our MD simulations also suggest that nucleation occurs first in a-Si and subsequent crystallization proceeds toward l-Si in the near-complete-melting case.

    Original languageEnglish
    Title of host publicationMaterials Research Society Symposium Proceedings - Artificially Induced Grain Alignment in Thin Films
    Pages179-183
    Number of pages5
    Publication statusPublished - Dec 1 2009
    Event2008 MRS Fall Meeting - Boston, MA, United States
    Duration: Dec 2 2008Dec 4 2008

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume1150
    ISSN (Print)0272-9172

    Other

    Other2008 MRS Fall Meeting
    Country/TerritoryUnited States
    CityBoston, MA
    Period12/2/0812/4/08

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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