Crystallization to polycrystalline silicon thin film and simultaneous inactivation of electrical defects by underwater laser annealing

Emi Machida, Masahiro Horita, Yasuaki Ishikawa, Yukiharu Uraoka, Hiroshi Ikenoue

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

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Engineering

Material Science