Damage free al doping on 4H-SiC with passivation films Using XeF excimer laser irradiation in AlCl3 acid solution

T. Tsuchiya, A. Suwa, A. Ikeda, D. Nakamura, T. Asano, H. Ikenoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose an innovative method for aluminum doping of 4H-SiC with passivation films, induced by XeF excimer laser irradiation in AlCl3 aqueous solution (28.6 wt%). A 100-nm thick Si passivation film was deposited on an n-type 4H-SiC substrate by physical vapor deposition. Using a laser beam (200 μm × 170 μm) with an irradiation fluence of 0.5.5.0 J/cm2, 1.300 shots were administered. After laser irradiation of 1.0 J/cm2 and 300 shots, an Al-Si-O compound film was formed on the SiC surface. The compound film was removed by chemical wet etching and plasma treatment. After the removal of the compound film, no irradiation damage was observed on the SiC surface. From the results of secondary ion mass spectrometry measurements, high concentration aluminum doping (about 1 × 1020/cm3 at the surface) was confirmed. The I-V characteristics of the junction between the n-type substrate and the irradiation area indicated clear rectification with a large on/off ratio of 9 decades in the range of ±10 V. When forward biased, electroluminescence phenomenon with a peak at 387 nm, corresponding to the electroluminescence of SiC's band gap, was confirmed. These results prove the achievement of Al doping of n-type SiC to p-type using laser irradiation without any damage to the SiC surface.

Original languageEnglish
Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
EditorsBeat Neuenschwander, Tetsuya Makimura, Costas P. Grigoropoulos, Gediminas Raciukaitis
PublisherSPIE
ISBN (Electronic)9781510606234
DOIs
Publication statusPublished - 2017
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 2017 - San Francisco, United States
Duration: Jan 30 2017Feb 2 2017

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10091
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 2017
CountryUnited States
CitySan Francisco
Period1/30/172/2/17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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