Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The results of a comparative investigation on the emission characteristics of debris from CO2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO 2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO2 laser in compared with Nd: YAG laser for the same laser energy of ∼50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.

Original languageEnglish
Title of host publicationPhoton Processing in Microelectronics and Photonics VII
DOIs
Publication statusPublished - Jun 17 2008
EventPhoton Processing in Microelectronics and Photonics VII - San Jose, CA, United States
Duration: Jan 21 2008Jan 24 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6879
ISSN (Print)0277-786X

Other

OtherPhoton Processing in Microelectronics and Photonics VII
CountryUnited States
CitySan Jose, CA
Period1/21/081/24/08

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Nakamura, D., Tamaru, K., Akiyama, T., Takahashi, A., & Okada, T. (2008). Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source. In Photon Processing in Microelectronics and Photonics VII [687909] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6879). https://doi.org/10.1117/12.767894