Decomposition of tetrafluoromethane by water plasma generated under atmospheric pressure

Narengerile, Hironori Saito, Takayuki Watanabe

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

Tetrafluoromethane (CF4) decomposition by water plasma generated under atmospheric pressure was investigated by means of thermodynamic analyses and experiments. Thermodynamic equilibrium calculations were performed between 300 and 6000 K at atmospheric pressure. Experimental results indicated that CF4 was completely decomposed by water plasma, and recovery of fluorine can be achieved more than 99%. Influence of factors such as arc current and additive flow rate of O2 on CF4 decomposition was determined. Furthermore, the decomposition mechanism of CF4 was investigated from chemical kinetics consideration. CFx (x: 1-4) was thermally decomposed above 4000 K, oxidized in the temperature range of 4000-2400 K, and removed by H radical at temperatures below 2400 K.

Original languageEnglish
Pages (from-to)929-935
Number of pages7
JournalThin Solid Films
Volume518
Issue number3
DOIs
Publication statusPublished - Dec 30 2009
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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