Decomposition of tetrafluoromethane by water plasma generated under atmospheric pressure

Narengerile, Hironori Saito, Takayuki Watanabe

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Tetrafluoromethane (CF4) decomposition by water plasma generated under atmospheric pressure was investigated by means of thermodynamic analyses and experiments. Thermodynamic equilibrium calculations were performed between 300 and 6000 K at atmospheric pressure. Experimental results indicated that CF4 was completely decomposed by water plasma, and recovery of fluorine can be achieved more than 99%. Influence of factors such as arc current and additive flow rate of O2 on CF4 decomposition was determined. Furthermore, the decomposition mechanism of CF4 was investigated from chemical kinetics consideration. CFx (x: 1-4) was thermally decomposed above 4000 K, oxidized in the temperature range of 4000-2400 K, and removed by H radical at temperatures below 2400 K.

Original languageEnglish
Pages (from-to)929-935
Number of pages7
JournalThin Solid Films
Volume518
Issue number3
DOIs
Publication statusPublished - Dec 30 2009
Externally publishedYes

Fingerprint

Atmospheric pressure
atmospheric pressure
Decomposition
Plasmas
decomposition
Water
Thermodynamics
water
Fluorine
thermodynamic equilibrium
Reaction kinetics
fluorine
reaction kinetics
flow velocity
arcs
recovery
Flow rate
Recovery
Temperature
thermodynamics

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Decomposition of tetrafluoromethane by water plasma generated under atmospheric pressure. / Narengerile; Saito, Hironori; Watanabe, Takayuki.

In: Thin Solid Films, Vol. 518, No. 3, 30.12.2009, p. 929-935.

Research output: Contribution to journalArticle

@article{9fb5bfaf1aec4f6a8d62c41c75134aab,
title = "Decomposition of tetrafluoromethane by water plasma generated under atmospheric pressure",
abstract = "Tetrafluoromethane (CF4) decomposition by water plasma generated under atmospheric pressure was investigated by means of thermodynamic analyses and experiments. Thermodynamic equilibrium calculations were performed between 300 and 6000 K at atmospheric pressure. Experimental results indicated that CF4 was completely decomposed by water plasma, and recovery of fluorine can be achieved more than 99{\%}. Influence of factors such as arc current and additive flow rate of O2 on CF4 decomposition was determined. Furthermore, the decomposition mechanism of CF4 was investigated from chemical kinetics consideration. CFx (x: 1-4) was thermally decomposed above 4000 K, oxidized in the temperature range of 4000-2400 K, and removed by H radical at temperatures below 2400 K.",
author = "Narengerile and Hironori Saito and Takayuki Watanabe",
year = "2009",
month = "12",
day = "30",
doi = "10.1016/j.tsf.2009.07.164",
language = "English",
volume = "518",
pages = "929--935",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "3",

}

TY - JOUR

T1 - Decomposition of tetrafluoromethane by water plasma generated under atmospheric pressure

AU - Narengerile,

AU - Saito, Hironori

AU - Watanabe, Takayuki

PY - 2009/12/30

Y1 - 2009/12/30

N2 - Tetrafluoromethane (CF4) decomposition by water plasma generated under atmospheric pressure was investigated by means of thermodynamic analyses and experiments. Thermodynamic equilibrium calculations were performed between 300 and 6000 K at atmospheric pressure. Experimental results indicated that CF4 was completely decomposed by water plasma, and recovery of fluorine can be achieved more than 99%. Influence of factors such as arc current and additive flow rate of O2 on CF4 decomposition was determined. Furthermore, the decomposition mechanism of CF4 was investigated from chemical kinetics consideration. CFx (x: 1-4) was thermally decomposed above 4000 K, oxidized in the temperature range of 4000-2400 K, and removed by H radical at temperatures below 2400 K.

AB - Tetrafluoromethane (CF4) decomposition by water plasma generated under atmospheric pressure was investigated by means of thermodynamic analyses and experiments. Thermodynamic equilibrium calculations were performed between 300 and 6000 K at atmospheric pressure. Experimental results indicated that CF4 was completely decomposed by water plasma, and recovery of fluorine can be achieved more than 99%. Influence of factors such as arc current and additive flow rate of O2 on CF4 decomposition was determined. Furthermore, the decomposition mechanism of CF4 was investigated from chemical kinetics consideration. CFx (x: 1-4) was thermally decomposed above 4000 K, oxidized in the temperature range of 4000-2400 K, and removed by H radical at temperatures below 2400 K.

UR - http://www.scopus.com/inward/record.url?scp=70350495209&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70350495209&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2009.07.164

DO - 10.1016/j.tsf.2009.07.164

M3 - Article

AN - SCOPUS:70350495209

VL - 518

SP - 929

EP - 935

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 3

ER -