Deep-ultraviolet light detection of p-type ultrananocrystalline diamond/hydrogenated amorphous carbon composite films

Shinya Ohmagari, Tsuyoshi Yoshitake

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    Abstract

    Deep-ultraviolet (DUV) light detection of p-type ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films prepared by pulsed laser deposition was investigated. The photocurrent spectra revealed that the UNCD/a-C:H films possess strong responses in the wavelength range between 210 and 280 nm, which might originate from UNCD grains. The heterojunction photodiodes comprised of p-type UNCD/a-C:H and n-type Si exhibited an obvious photovoltaic action for 254nm DUV light illumination. The external quantum efficiency and responsivity of the photodiodes were estimated to be 71% and 130mA/W, respectively. It was proved that UNCD/a-C:H is a new promising material applicable to DUV photodetectors.

    Original languageEnglish
    Article number065202
    JournalApplied Physics Express
    Volume5
    Issue number6
    DOIs
    Publication statusPublished - Jun 1 2012

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    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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