Defect and field-enhancement characterization through electron-beam-induced current analysis

Hitoshi Umezawa, Hiroki Gima, Khaled Driche, Yukako Kato, Tsuyoshi Yoshitake, Yoshiaki Mokuno, Etienne Gheeraert

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6 Citations (Scopus)

Abstract

To investigate the effects of defects and field enhancement in diamond power devices, a biased Schottky barrier diode was characterized by electron-beam-induced current (EBIC) analysis. The nonuniform distribution of the electrical field was revealed by bright spots on the laterally expanded depletion layer of the EBIC intensity map when the applied electrical field exceeded 0.95 MV/cm. The nonuniformity is partly due to a structural effect: the roughness at the edge of the Schottky electrode, induced by lithography and lift-off processes. A second family of spots was shown to increase the leakage current of the device. The time constant associated with this second spot family was 0.98 ms, which is three orders of magnitude shorter than that for defects previously characterized by deep-level transient spectroscopy.

Original languageEnglish
Article number182103
JournalApplied Physics Letters
Volume110
Issue number18
DOIs
Publication statusPublished - May 1 2017

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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