Dehydrogenation-enhanced large strain (∼1.6%) in Si pillars covered by Si3N4 stress liners

Masashi Kurosawa, Taizoh Sadoh, Masanobu Miyao

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Dehydrogenation-enhanced large strain (∼1.6%) in Si pillars covered by Si3N4 stress liners'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds