Demonstration of GaN/LiNbO3 Hybrid Wafer Using Room-Temperature Surface Activated Bonding

Ryo Takigawa, Takashi Matsumae, Michitaka Yamamoto, Eiji Higurashi, Tanemasa Asano, Haruichi Kanaya

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds