Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides

Ryo Takigawa, Eiji Higurashi, Tetsuya Kawanishi, Tanemasa Asano

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

In this paper, the application of the ultraprecision ductile-mode cutting method to the fabrication of microring waveguides in lithium niobate crystal was investigated. Although it was difficult to apply a mechanical cutting method to the fabrication of microring waveguides with smooth sidewalls, it was confirmed that no harmful cutting traces on the machined surface occur with the appropriate movement of the cutting tool. The root-meansquare surface roughness of the resulting sidewall was 6.1 nm, which is sufficiently small to suppress the scattering loss of the circulating light. In addition, the conditions for the ductile-mode cutting of lithium niobate crystal were investigated.

Original languageEnglish
Article number110304
JournalJapanese journal of applied physics
Volume55
Issue number11
DOIs
Publication statusPublished - Nov 2016

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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