Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

T. Shimogaki; T. Ofuji; M. Higashihata; Hiroshi Ikenoue; Daisuke Nakamura; Tanemasa Asano; T. Okada

doi:10.1109/CLEOPR.2013.6600321

Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

T. Shimogaki, T. Ofuji, M. Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tanemasa Asano, T. Okada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.

Original language	English
Title of host publication	2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs	https://doi.org/10.1109/CLEOPR.2013.6600321
Publication status	Published - Oct 18 2013
Event	10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan Duration: Jun 30 2013 → Jul 4 2013

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other	10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Country/Territory	Japan
City	Kyoto
Period	6/30/13 → 7/4/13

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/CLEOPR.2013.6600321

Cite this

Shimogaki, T., Ofuji, T., Higashihata, M., Ikenoue, H., Nakamura, D., Asano, T., & Okada, T. (2013). Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600321] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600321

Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. / Shimogaki, T.; Ofuji, T.; Higashihata, M. et al.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600321 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shimogaki, T, Ofuji, T, Higashihata, M, Ikenoue, H , Nakamura, D , Asano, T & Okada, T 2013, Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. in 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600321, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600321

Shimogaki T, Ofuji T, Higashihata M, Ikenoue H , Nakamura D , Asano T et al. Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600321. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2013.6600321

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title = "Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser",

abstract = "P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.",

author = "T. Shimogaki and T. Ofuji and M. Higashihata and Hiroshi Ikenoue and Daisuke Nakamura and Tanemasa Asano and T. Okada",

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AU - Ikenoue, Hiroshi

AU - Nakamura, Daisuke

AU - Asano, Tanemasa

AU - Okada, T.

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Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

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