Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

T. Shimogaki, T. Ofuji, M. Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tanemasa Asano, T. Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

P-implanted ZnO nanorods were annealed by a KrF excimer laser at different repetition rate. The entire implanted region of ZnO nanorods was annealed beyond the optical-absorption length at high repetition rate.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs
Publication statusPublished - Oct 18 2013
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: Jun 30 2013Jul 4 2013

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
CountryJapan
CityKyoto
Period6/30/137/4/13

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Shimogaki, T., Ofuji, T., Higashihata, M., Ikenoue, H., Nakamura, D., Asano, T., & Okada, T. (2013). Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600321] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600321