Abstract
A large diameter electron cyclotron resonance plasma was produced with a multi-slot antenna. The radial profile of the ion saturation current was examined as a function of input microwave power, gas pressure and magnetic mirror coil current to determine the experimental conditions necessary for a large diameter and uniform plasma at low pressure. Furthermore, the deposition of a-Si: H films was attempted onto 8 inch glass substrates using a gas mixture SiH4-10% He.
Original language | English |
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Pages (from-to) | 503-507 |
Number of pages | 5 |
Journal | Surface and Coatings Technology |
Volume | 74-75 |
Issue number | PART 1 |
DOIs | |
Publication status | Published - Sep 1995 |
All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry