Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD

Kazunori Koga, Kenta Nakahara, Yeon Won Kim, Yuki Kawashima, Takeaki Matsunaga, Muneharu Sato, Daisuke Yamashita, Hidefumi Matsuzaki, Giichiro Uchida, Kunihiro Kamataki, Naho Itagaki, Masaharu Shiratani

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Deposition of cluster-free P-doped a-Si:H films using SiH<sub>4</sub>+PH<sub>3</sub> multi-hollow discharge plasma CVD'. Together they form a unique fingerprint.

Physics & Astronomy