Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Masanori Shinohara; Taisuke Tominaga; Hayato Shimomura; Takeshi Ihara; Yoshihito Yagyu; Tamiko Ohshima; Hiroharu Kawasaki

doi:10.1541/ieejfms.138.538

Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

Masanori Shinohara, Taisuke Tominaga, Hayato Shimomura, Takeshi Ihara, Yoshihito Yagyu, Tamiko Ohshima, Hiroharu Kawasaki

Research output: Contribution to journal › Article › peer-review

Abstract

A hydrophilic amorphous carbon film was deposited with plasma enhanced chemical vapor deposition (PECVD) using diisopropylether ((i-C₃H₇)₂O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp³-hydrocarbon components, which is the same as the isopropy group in the source molecule. On the other hand, C=O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C-O-C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

Original language	English
Pages (from-to)	538-543
Number of pages	6
Journal	IEEJ Transactions on Fundamentals and Materials
Volume	138
Issue number	11
DOIs	https://doi.org/10.1541/ieejfms.138.538
Publication status	Published - 2018
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

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10.1541/ieejfms.138.538

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title = "Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction",

abstract = "A hydrophilic amorphous carbon film was deposited with plasma enhanced chemical vapor deposition (PECVD) using diisopropylether ((i-C3H7)2O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp3-hydrocarbon components, which is the same as the isopropy group in the source molecule. On the other hand, C=O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C-O-C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.",

author = "Masanori Shinohara and Taisuke Tominaga and Hayato Shimomura and Takeshi Ihara and Yoshihito Yagyu and Tamiko Ohshima and Hiroharu Kawasaki",

note = "Publisher Copyright: {\textcopyright} 2018 The Institute of Electrical Engineers of Japan.",

year = "2018",

doi = "10.1541/ieejfms.138.538",

language = "English",

volume = "138",

pages = "538--543",

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TY - JOUR

T1 - Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

AU - Shinohara, Masanori

AU - Tominaga, Taisuke

AU - Shimomura, Hayato

AU - Ihara, Takeshi

AU - Yagyu, Yoshihito

AU - Ohshima, Tamiko

AU - Kawasaki, Hiroharu

PY - 2018

Y1 - 2018

N2 - A hydrophilic amorphous carbon film was deposited with plasma enhanced chemical vapor deposition (PECVD) using diisopropylether ((i-C3H7)2O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp3-hydrocarbon components, which is the same as the isopropy group in the source molecule. On the other hand, C=O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C-O-C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

AB - A hydrophilic amorphous carbon film was deposited with plasma enhanced chemical vapor deposition (PECVD) using diisopropylether ((i-C3H7)2O) as a source molecule. Bonding states of hydrocarbon in the deposited film are comprised of sp3-hydrocarbon components, which is the same as the isopropy group in the source molecule. On the other hand, C=O bonding is formed in the deposited film, not as similar to the source molecule, diisopropylether. These results suggest that C-O-C in the source molecule would be cleaved. This study would propose a new deposition method of a hydrophilic amorphous carbon film with ether as a source molecule.

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JF - IEEJ Transactions on Fundamentals and Materials

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Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction

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